2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) 2024
DOI: 10.1109/uffc-js60046.2024.10793761
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A High Power-handling Laterally-excited Bulk Acoustic Resonator with Scattering Vias in Double-layer Electrodes over +35 dBm

Zhiwei Wen,
Wenjuan Liu,
Min Zeng
et al.
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