A High-Power Temperature-Stable Electrostatic RF MEMS Capacitive Switch Based on a Thermal Buckle-Beam Design

Mahameed, Rashed; Rebeiz, Gabriel M.

doi:10.1109/jmems.2010.2049475

Cited by 49 publications

(21 citation statements)

References 19 publications

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“…The suspended electrode displacement ∆Z in the z-axis is nearly zero; therefore, the spacing g and capacitance between the two electrodes remain constant when the temperature changes. Obtained from the literature, 12 the spring constant (k z ) of the beams hardly varies with the temperature. So, according to the pull-in voltage (V p ) formula given by Eq.…”

Section: Architecture Design and Principle Of Operationmentioning

confidence: 99%

“…In that case, the stiffness of the beam is affected more severely by temperature, and the pull-in voltage stability versus temperature becomes poorer. 12 In order to make the switch work reliably, packaging is needed. Usually packaging requires high temperature.…”

Section: Measurementmentioning

confidence: 99%

“…As a result, the gap between two electrodes of the switch is almost constant, which ensures a small change of pull-in voltage of the switch in a wide temperature range, while the influence of biaxial stress and stress gradient on the pull-in voltage of the switch is suppressed. 12 …”

Section: Introductionmentioning

confidence: 99%

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Design of DC-contact RF MEMS switch with temperature stability

Sun

Zhu

et al. 2015

AIP Advances

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Etching technique for ruthenium with a high etch rate and high selectivity using ozone gas In order to improve the temperature stability of DC-contact RF MEMS switch, a thermal buckle-beam structure is implemented. The stability of the switch pull-in voltage versus temperature is not only improved, but also the impact of stress and stress gradient on the drive voltage is suppressed. Test results show that the switch pull-in voltage is less sensitive to temperature between -20 • C and 100 • C. The variable rate of pull-in voltage to temperature is about -120 mV/ • C. The RF performance of the switch is stable, and the isolation is almost independent of temperature. After being annealed at 280 • C for 12 hours, our switch samples, which are suitable for packaging, have less than 1.5% change in the rate of pull-in voltage. C 2015 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution 3.0 Unported License. [http://dx Design of DC-contact RF MEMS switch with temperature stability

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Section: Architecture Design and Principle Of Operationmentioning

confidence: 99%

Section: Measurementmentioning

confidence: 99%

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Design of DC-contact RF MEMS switch with temperature stability

Sun

Zhu

et al. 2015

AIP Advances

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“…Concerning the RF-MEMS mechanical topologies required in microwave reconfigurable circuits they typically include clamped-clamped bridges or cantilever switches (either ohmic or capacitive), with different type of suspensions such as straight-beam Fedder 1994;Persano et al 2016) and folded-beam (Contreras et al 2012;Fedder 1994;Peroulis et al 2003, Kim et al 2014Kim et al 2009;Lakshmi et al 2016). The type of suspension influences the fabrication residual stress of the MEMS membrane, a critical parameter to meet the desired ON/OFF capacitance ratio in capacitive switches, the contact resistance in ohmic switches, and the actuation voltages (Peroulis et al 2003;Mahameed et al 2010;Philippine et al 2013;Persano et al 2016;Kim et al 2009;Lakshmi et al 2016), which in turn determine the microwave behavior (central frequency, bandwidth) of frequencyreconfigurable filters. A solution to this problem is the use of RF-MEMS switched capacitors to obtain precise frequency shifts (Pothier et al 2005;Nadaud et al 2016).…”

Section: Introductionmentioning

confidence: 99%

“…A solution to this problem is the use of RF-MEMS switched capacitors to obtain precise frequency shifts (Pothier et al 2005;Nadaud et al 2016). The fabrication residual stress can be reduced either by improving the geometry and the structural switch design (Mahameed et al 2010;Philippine et al 2013;Patel et al 2012;Zaireie et al 2013;Yang et al 2015), since these determine their stiffness and therefore actuation voltage and reliability, or utilizing particular materials, and therefore a special dedicated fabrication process (Palego et al 2009, Ke et al 2013, Sterner et al 2008. In (Patel et al 2012) a crab-leg beam geometry is used to achieve a highly reliable switch, but with a high actuation voltage (80-90 V).…”

Section: Introductionmentioning

confidence: 99%

RF-MEMS switches for a full control of the propagating modes in uniplanar microwave circuits and their application to reconfigurable multimodal microwave filters

et al. 2017

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Aquesta és una còpia de la versió author's final draft d'un article publicat a la revista Microsystem technologies.La publicació final està disponible a Springer a través de http://dx.doi.org/10.1007/s00542-017- This is a copy of the author 's final draft version of an article published in the journal Microsystem technologies. Abstract. In this paper, new RF-MEMS switch configurations are proposed to enable control of the propagating (even and odd) modes in multimodal CPW transmission structures. Specifically, a switchable air bridge (a switchable short-circuit for the CPW odd mode) and switchable asymmetric shunt impedances (for transferring energy between modes) are studied and implemented using bridge-type and cantilever-type ohmic-contact switches, respectively. The switchable air bridge is based in a novel double ohmic-contact bridge-type structure. Optimized-shape suspension configurations, namely folded-beam or diagonal-beam for bridge-type switches, and straight-shaped or semicircular-shaped for cantilever-type switches, are used to obtain robust structures against fabrication-stress gradients. The switches are modelled using a coupled-field 3D finite-element mechanical analysis showing a low to moderate pull-in voltage. The fabricated switches are experimentally characterized using S-parameter and DC measurements. The measured pull-in voltages agree well with the simulated values. From S-parameter measurements, an electrical model with a very good agreement for both switch states (ON and OFF) has been obtained. The model is used in the design of reconfigurable CPW multimodal microwave filters.

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Polarization Reconfigurable Antennas

Babakhani¹,

Sharma²

2021

Multifunctional Antennas and Arrays for Wireless Communication Systems

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A High-Power Temperature-Stable Electrostatic RF MEMS Capacitive Switch Based on a Thermal Buckle-Beam Design

Cited by 49 publications

References 19 publications

Design of DC-contact RF MEMS switch with temperature stability

Design of DC-contact RF MEMS switch with temperature stability

RF-MEMS switches for a full control of the propagating modes in uniplanar microwave circuits and their application to reconfigurable multimodal microwave filters

Polarization Reconfigurable Antennas

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