A High-Precision Quartz Resonant Ultra-High Pressure Sensor with Integrated Pressure Conversion Structure

Abstract

A quartz resonant pressure sensor is proposed for high-precision measurement of ultra-high pressure. The resonant unit realizes a push–pull differential layout, which restrains the common-mode interference factor, and the resonator is only subject to axial force. The pressure conversion unit is made in an integrated manner, avoiding output drift problems caused by residual stress and small gaps during assembly, welding, and other processes in sensor preparation. Theoretical and simulation analysis was conducted on the overall design scheme of the sensor in this paper, verifying the feasibility. Sensor prototypes were created and performance experiments were conducted. The experimental results show that the sensitivity of the ultra-high pressure sensor is 46.32 Hz/MPa at room temperature within the pressure range of 120 MPa, and the comprehensive accuracy is 0.0266%. The comprehensive accuracy of the sensor is better than 0.0288% FS in the full temperature range environment. This proves that the sensor scheme is suitable for high-precision and high-stability detection of ultra-high pressure, providing new solutions in special pressure measurement fields such as deep-sea and oil exploration.

Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging

“…Zhao 65 – 67 introduced a range of differential RPSs utilizing piezoelectric quartz resonant beams. The resonator undergoes fabrication through anisotropic etching, and the quartz sensing component is affixed to a silicon membrane, as depicted in Fig.…”

“… a Stress simulation of differential output tuning fork tines 65 . b Main fabrication process of the DETF quartz resonator 65 . c Photograph of the tuning fork prototype 65 .…”

“…b Main fabrication process of the DETF quartz resonator 65 . c Photograph of the tuning fork prototype 65 . d Packaged pressure sensor prototype with a tuning fork and stainless-steel package 68 , 69 .…”

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