A High-Quality-Factor Film Bulk Acoustic Resonator in Liquid for Biosensing Applications

Xu, Wen‐Cheng; Zhang, Xu; Choi, Seokheun; Chae, Junseok

doi:10.1109/jmems.2010.2093568

Cited by 47 publications

(35 citation statements)

References 32 publications

(33 reference statements)

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“…Since a QCM confines half a wavelength λ in the substrate thickness t, the resonator frequency is related to the acoustic velocity v by f 0 = c/λ = v/(2t): reaching low t values has been investigated in the free membrane strategy of the Film Bulk Acoustic Resonator (FBAR) 12,13 . The HBAR pre-vents the fragile piezoelectric membrane from collapsing by being supported on a low acoustic loss substrate.…”

Section: Acoustic Wave Transducersmentioning

confidence: 99%

High-overtone bulk-acoustic resonator gravimetric sensitivity: Towards wideband acoustic spectroscopy

Rabus

Friedt

Ballandras

et al. 2015

Journal of Applied Physics

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In the context of direct detection sensors with compact dimensions, we investigate the gravimetric sensitivity of High-overtone Bulk Acoustic Resonators, through modeling of their acoustic characteristics and experiment. The high frequency characterizing such devices is expected to induce a significant effect when the acoustic field boundary conditions are modified by a thin adlayer. Furthermore, the multimode spectral characteristics is considered for wideband acoustic spectroscopy of the adlayer, once the gravimetric sensitivity dependence of the various overtones is established. Finally, means of improving the gravimetric sensitivity by confining the acoustic field in a low acoustic-impedance layer is theoretically established.

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Section: Acoustic Wave Transducersmentioning

confidence: 99%

High-overtone bulk-acoustic resonator gravimetric sensitivity: Towards wideband acoustic spectroscopy

Rabus

Friedt

Ballandras

et al. 2015

Journal of Applied Physics

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“…Traditional studies for protein -ligand interactions require chemical, fluorescent or radioactive labelling, which usually compromise the protein activity and do not give real-time interaction information. Therefore, label-free biosensors have received much attention because they can directly measure biomolecular interactions in realtime and in situ.Over the past ten years, the commercial success of film bulk acoustic resonators (FBARs) in radio frequency communication has motivated researchers to explore their applications for label-free and high sensitive biochemical sensing [1,2]. FBARs make use of standard IC fabrication technology, thereby realising the ability to inexpensively combine a number of sensors on a chip and integrate them with the analytical circuits.…”

mentioning

confidence: 99%

“…Over the past ten years, the commercial success of film bulk acoustic resonators (FBARs) in radio frequency communication has motivated researchers to explore their applications for label-free and high sensitive biochemical sensing [1,2]. FBARs make use of standard IC fabrication technology, thereby realising the ability to inexpensively combine a number of sensors on a chip and integrate them with the analytical circuits.…”

mentioning

confidence: 99%

Lateral field excited film bulk acoustic resonator for detection of protein–ligand interactions

Chen

Wang

2012

Electron. Lett.

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Presented is a lateral field excited film bulk acoustic resonator for realtime sensing of protein -ligand interaction using the biotin -streptavidin system as a model. The film bulk acoustic resonator works at 2 GHz in shear mode. For biosensing, the biotin was immobilised on one face of the resonator as the probe. The resonant frequency of the biotin-immobilised device drops rapidly at first and gradually reaches equilibrium when exposed to the streptavidin solutin due to the biotin -streptavidin interaction. Consequently, the lateral field excited film bulk acoustic resonator can be used to study the kinetics of protein -ligand interaction without the use of labelling or molecular tags. The proposed device shows promising applications for disease diagnostics, prognosis, and drug discovery.Introduction: In the field of biotechnology and pharmaceutics, one of the critical parts is understanding the kinetics of protein-ligand interactions. Traditional studies for protein -ligand interactions require chemical, fluorescent or radioactive labelling, which usually compromise the protein activity and do not give real-time interaction information. Therefore, label-free biosensors have received much attention because they can directly measure biomolecular interactions in realtime and in situ.Over the past ten years, the commercial success of film bulk acoustic resonators (FBARs) in radio frequency communication has motivated researchers to explore their applications for label-free and high sensitive biochemical sensing [1,2]. FBARs make use of standard IC fabrication technology, thereby realising the ability to inexpensively combine a number of sensors on a chip and integrate them with the analytical circuits. The applications of FBARs for real-time biochemical detection require their operation in shear mode due to the minimal damping in the liquid-solid interface. Some investigations demonstrated quasishear mode FBARs based on inclined c-axis oriented ZnO or AlN piezoelectric films coupled with the electrodes which are situated on opposite sides of the films [3,4]. An apparent deficiency of the quasi-shear resonator is the existence of an amount of longitudinal component in the wave polarisation, which inevitably leads to acoustic energy leakage into the liquid. To alleviate this problem, the lateral electric field is employed to excite pure shear mode in ZnO or AlN films [5].In this reported work, we fabricated a lateral field excited FBAR and used it for real-time sensing of protein-ligand interaction. For a demonstrational study, the biotin -streptavidin system was chosen as a model since such a system has been well characterised. High binding affinity and stability makes the biotin -streptavidin system very useful in many biotechnological applications such as in affinity separation, in diagnostics, for molecular tagging, for imaging application, biomolecular delivery, and in the characterisation of surface bound biomolecular species.

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“…With a working resonance of 2 to 10 GHz, the FBAR has a minimum detectable mass change in the range of 10 ng/cm 2 , which is several orders of magnitude lower than that of QCM, the working resonance of which is in several megahertz. To date, many attempts to use the FBAR for biochemical applications have been made, with remarkable results [5,6].In the work reported in this Letter, we developed a label-free biosensor based on an FBAR to detect alpha-fetoprotein (AFP). In clinical diagnosis, AFP is a serological marker for hepatocellular carcinoma (HCC), which is the fifth most common cancer and the third leading cause of cancer death worldwide.…”

mentioning

confidence: 99%

mentioning

confidence: 99%

Film bulk acoustic resonator based biosensor for detection of cancer serological marker

Chen

Wang

et al. 2011

Electron. Lett.

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Presented is a label-free biosensor based on a film bulk acoustic resonator (FBAR) to detect one of the cancer markers of alpha-fetoprotein (AFP). The FBAR consisted of a ZnO piezoelectric stack and works near 2.1 GHz. The monoclonal anti-AFP antibody was coated on the surface of the piezoelectric stack as the special bioprobe. Experimental results demonstrate that the FBAR based biosensor can detect AFP antigen successfully without chemical or fluorescent labelling. The minimum detectable AFP concentration of the proposed biosensor is 1 ng/ml with high selectivity. The advantages of this sensor, including the sample fabrication process, ease of detection method, low cost, high sensitive and high-throughput, mean that it has much promise in cancer diagnosis.Introduction: To accurately diagnose and closely monitor complex disease such as cancer, the quantitative detection of multiple serological markers is necessary. In the last few years, there has been growing interest in label-free biosensors using optical and gravimetric systems, such as surface plasmon resonance (SPR) [1], quartz crystal microbalance (QCM) [2], surface acoustic wave (SAW) devices [3] and microcantilevers [4] to detect the presence of specific compounds with selectivity and quantity. Unfortunately, for cancer diagnosis, low-cost, highly sensitive, high-throughput and easily operated technology is still in the developmental stage and requires significant improvements for practical applications.The micromachined monolithic film bulk acoustic resonator (FBAR) makes use of standard silicon technology, and provides low cost and high throughput using a simple electrical detection method with no need of expensive optical apparatus and labelling with fluorescent or adioactive molecules. With a working resonance of 2 to 10 GHz, the FBAR has a minimum detectable mass change in the range of 10 ng/cm 2 , which is several orders of magnitude lower than that of QCM, the working resonance of which is in several megahertz. To date, many attempts to use the FBAR for biochemical applications have been made, with remarkable results [5,6].In the work reported in this Letter, we developed a label-free biosensor based on an FBAR to detect alpha-fetoprotein (AFP). In clinical diagnosis, AFP is a serological marker for hepatocellular carcinoma (HCC), which is the fifth most common cancer and the third leading cause of cancer death worldwide. To enhance the early diagnosis level of HCC, a biosensor applied for AFP detection would better feature the concentration detection limit of less than 10 ng/ml, that is, at ng/ml level [7]. Based on the very low detectable mass change of an FBAR, our FBAR based biosensor can detect the presence of 1 ng/ml AFP antigen successfully.

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A High-Quality-Factor Film Bulk Acoustic Resonator in Liquid for Biosensing Applications

Cited by 47 publications

References 32 publications

High-overtone bulk-acoustic resonator gravimetric sensitivity: Towards wideband acoustic spectroscopy

High-overtone bulk-acoustic resonator gravimetric sensitivity: Towards wideband acoustic spectroscopy

Lateral field excited film bulk acoustic resonator for detection of protein–ligand interactions

Film bulk acoustic resonator based biosensor for detection of cancer serological marker

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