We report a He and H 2 diffraction study of graphene-terminated Ru(0001) thin films grown epitaxially on c-axis sapphire. Even for samples exposed for several weeks to ambient conditions, brief annealing in ultrahigh vacuum restored extraordinarily high specular reflectivities for He and H 2 beams (23% and 7% of the incident beam, respectively). The quality of the angular distributions recorded with both probes exceeds the one obtained from in-situ prepared graphene on Ru(0001) single crystals. Our results for graphene-terminated Ru thin films represent a significant step toward ambient tolerant, high-reflectivity curved surface mirrors for He-atom microscopy. Electromagnetic and electrostatic lenses and mirrors allow the facile manipulation of beams of charged particles (electrons, ions). The focusing of neutral particle (atom, molecule) beams is significantly more challenging, but it can in principle be accomplished by either refractive (Fresnel) or reflective optics (surface mirrors). Efficient focusing of neutral He beams would establish a foundation for realizing scanning He atom microscopy.1,2 Using focused beams of neutral, low-energy ($50 meV) He atoms for imaging, this technique could avoid issues due to electrical charging and beam damage inherent in higher energy electron-or ion microscopy, and thus provide unprecedented insight into the nanoscale structure of biological materials, polymers, ceramics, and other insulators.While the focusing of He atom beams to $2 lm spots has been demonstrated using Fresnel zone plates 2-5 and surface mirrors, 1,6,7 both approaches entail challenges that need to be resolved before sub-lm focusing can be achieved. Free-standing zone plates for high-transmission focusing of neutral beams are fragile, require complex fabrication processes, and suffer from chromatic aberrations. Mirror opticsinherently achromatic-provide a possible alternative. The main obstacle to using atom-focusing mirrors has been the requirement for atomically smooth surfaces with high specular reflectivity, which can remain long-term stable in vacuum and are easily recovered following exposure to ambient conditions. Initial work has employed mirrors of H-passivated Si(111) with specular reflectivities of $1% and limited stability in ambient air.1 Quartz mirrors, appealing for their simplicity, also have low reflectivity except under grazing incidence.6 Quantum-stabilized Pb films on Si(111) 8 and Pb(H3 Â H3)R30/Si(111) surfaces 9 provide high specular He reflectivity ($15%) but are only stable in ultrahigh vacuum (UHV). We have recently shown that monolayer graphene (MLG) on Ru(0001) single crystals can provide an inert surface 10,11 with high reflectivity for thermal He and H 2 beams.12 However, a path toward using such surfaces in curved mirrors has not been demonstrated so far.Curved MLG/Ru focusing elements may be realized by using polycrystalline Ru thin films conformally coating a shaped amorphous substrate (e.g., fused silica), 10 but surface roughness could limit the achievable He spot sizes...