A high-resolution resonant MEMS accelerometer

Zou, Xudong; Seshia, Ashwin A.

doi:10.1109/transducers.2015.7181156

Cited by 61 publications

(19 citation statements)

References 11 publications

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“…Linear inertial forces on structures can also be coupled to a resonator structure to realize resonant accelerometers [ 320 , 321 , 322 ]. Figure 38 is an SEM image of a resonant accelerometer where displacements of proof mass were measured through changes in the resonant frequency of the connector beam [ 321 ].…”

Section: Applicationsmentioning

confidence: 99%

Micromachined Resonators: A Review

et al. 2016

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This paper is a review of the remarkable progress that has been made during the past few decades in design, modeling, and fabrication of micromachined resonators. Although micro-resonators have come a long way since their early days of development, they are yet to fulfill the rightful vision of their pervasive use across a wide variety of applications. This is partially due to the complexities associated with the physics that limit their performance, the intricacies involved in the processes that are used in their manufacturing, and the trade-offs in using different transduction mechanisms for their implementation. This work is intended to offer a brief introduction to all such details with references to the most influential contributions in the field for those interested in a deeper understanding of the material.

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Section: Applicationsmentioning

confidence: 99%

Micromachined Resonators: A Review

et al. 2016

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“…With the rapid development of microelectromechanical systems (MEMS) technology over three decades, micromachined accelerometers have shown potential for high-precision applications, such as strategic-grade navigation [1], seismology [2,3,4,5] and gravimetry [6,7]. Based on the force-frequency characteristics of high-Q resonators, micromachined resonant accelerometer (MRA) is very attractive due to its high resolution and large dynamic range [8,9,10].…”

Section: Introductionmentioning

confidence: 99%

Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers

Yin

Fang

Liu

et al. 2019

Sensors

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Micromachined resonant accelerometers (MRAs), especially those devices fabricated by silicon on glass technology, suffer from temperature drift error caused by inherent thermal stress. This paper proposes two structure designs to attenuate the effect of thermal stress. The first MRA structure is realized by optimizing the locations of the bonding anchors and utilizing a special-shaped substrate to isolate the thermal stress generated during the die attach process. The second structure is designed using an isolation frame fixed by a single anchor to replace all dispersed anchors associated with the suspension beams and micro-levers. Simulated and experimental results show that both of the MRA structures can effectively reduce the thermal stress effect. The experimental results on one MRA prototype indicate that the differential temperature sensitivity reduces down to 1.9 μg/°C and its 15-day bias stability reaches 1.4 μg.

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“…Over the past few years, the rapid development of highly reliable microelectromechanical systems (MEMS) devices, such as MEMS accelerometers, has resulted in their extensive use in a wide range of applications, such as the automotive industry, medical devices, and consumer electronics [1][2][3][4]. The basic principle of operation of a MEMS accelerometer is to measure the proof-mass displacement caused by the applied acceleration.…”

Section: Introductionmentioning

confidence: 99%

Novel graphene-based optical MEMS accelerometer dependent on intensity modulation

2018

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This paper proposes a novel graphene‐based optical microelectromechanical systems MEMS accelerometer that is dependent on the intensity modulation and optical properties of graphene. The designed sensing system includes a multilayer graphene finger, a laser diode (LD) light source, a photodiode, and integrated optical waveguides. The proposed accelerometer provides several advantages, such as negligible cross‐axis sensitivity, appropriate linearity behavior in the operation range, a relatively broad measurement range, and a significantly wider bandwidth when compared with other important contributions in the literature. Furthermore, the functional characteristics of the proposed device are designed analytically, and are then confirmed using numerical methods. Based on the simulation results, the functional characteristics are as follows: a mechanical sensitivity of 1,019 nm/g, an optical sensitivity of 145.7 %/g, a resonance frequency of 15,553 Hz, a bandwidth of 7 kHz, and a measurement range of ±10 g. Owing to the obtained functional characteristics, the proposed device is suitable for several applications in which high sensitivity and wide bandwidth are required simultaneously.

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A high-resolution resonant MEMS accelerometer

Cited by 61 publications

References 11 publications

Micromachined Resonators: A Review

Micromachined Resonators: A Review

Temperature-Insensitive Structure Design of Micromachined Resonant Accelerometers

Novel graphene-based optical MEMS accelerometer dependent on intensity modulation

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