A High-Resolution Silicon-on-Glass $Z$ Axis Gyroscope Operating at Atmospheric Pressure

Ding, Haitao; Liu, Xuesong; Lin, Le; Chi, X.Z.; Cui, Jian; Kraft, Michaël; Yang, Zhenchuan; Yan, Guizhen

doi:10.1109/jsen.2010.2043669

Cited by 36 publications

(17 citation statements)

References 16 publications

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“…However, the maximum achievable bandwidth was only 10 Hz. The high performance symmetrical MEMS gyroscope packaged at atmospheric pressure was also reported in [37,38], the lowest noise floor is 2.5uV/Hz 1/2 . The bandwidth was limited within 50Hz.…”

Section: B Compensator Circuitmentioning

confidence: 81%

Design and Implementation of an Optimized Double Closed-Loop Control System for MEMS Vibratory Gyroscope

et al. 2014

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Section: B Compensator Circuitmentioning

confidence: 81%

Design and Implementation of an Optimized Double Closed-Loop Control System for MEMS Vibratory Gyroscope

et al. 2014

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“…A MEMS gyro sensitive structure fabrication process based on SOG and inductively coupled plasma deep reactive ion etching (ICP DRIE) with an aspect ratio of about 20 developed by Peking University is shown in Figure 11 a [ 26 , 27 , 28 ]. The starting wafers are 4 inch highly doped silicon wafer produced by OKMETIC (Vantaa, Finland) and a Pyrex 7740 glass wafer.…”

Section: Fabrication and Characterizationmentioning

confidence: 99%

Optimal Design of a Center Support Quadruple Mass Gyroscope (CSQMG)

Zhang

Zhou

Yin

et al. 2016

Sensors

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This paper reports a more complete description of the design process of the Center Support Quadruple Mass Gyroscope (CSQMG), a gyro expected to provide breakthrough performance for flat structures. The operation of the CSQMG is based on four lumped masses in a circumferential symmetric distribution, oscillating in anti-phase motion, and providing differential signal extraction. With its 4-fold symmetrical axes pattern, the CSQMG achieves a similar operation mode to Hemispherical Resonant Gyroscopes (HRGs). Compared to the conventional flat design, four Y-shaped coupling beams are used in this new pattern in order to adjust mode distribution and enhance the synchronization mechanism of operation modes. For the purpose of obtaining the optimal design of the CSQMG, a kind of applicative optimization flow is developed with a comprehensive derivation of the operation mode coordination, the pseudo mode inhibition, and the lumped mass twisting motion elimination. The experimental characterization of the CSQMG was performed at room temperature, and the center operation frequency is 6.8 kHz after tuning. Experiments show an Allan variance stability 0.12°/h (@100 s) and a white noise level about 0.72°/h/√Hz, which means that the CSQMG possesses great potential to achieve navigation grade performance.

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“…A further example of the proposed design methodology is now presented for a continuous time, 6th order band-pass EMΣΔM for a vibratory rate MEMS gyroscope fabricated in SOI technology, as described in [ 23 ]. Continuous time, band-pass EMΣΔM are a relatively recent development and are particularly difficult to design as the electrical filter part consists of resonators requiring both return-to-zero (RZ) and half-delay return-to-zero (HZ) digital to analogue conversion [ 14 , 24 ].…”

Section: Example 2: a 6th Order Band-pass Emσδm For A Mems Gyroscopementioning

confidence: 99%

Genetic Algorithm for the Design of Electro-Mechanical Sigma Delta Modulator MEMS Sensors

Wilcock

Kraft

2011

Sensors

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This paper describes a novel design methodology using non-linear models for complex closed loop electro-mechanical sigma-delta modulators (EMΣΔM) that is based on genetic algorithms and statistical variation analysis. The proposed methodology is capable of quickly and efficiently designing high performance, high order, closed loop, near-optimal systems that are robust to sensor fabrication tolerances and electronic component variation. The use of full non-linear system models allows significant higher order non-ideal effects to be taken into account, improving accuracy and confidence in the results. To demonstrate the effectiveness of the approach, two design examples are presented including a 5th order low-pass EMΣΔM for a MEMS accelerometer, and a 6th order band-pass EMΣΔM for the sense mode of a MEMS gyroscope. Each example was designed using the system in less than one day, with very little manual intervention. The strength of the approach is verified by SNR performances of 109.2 dB and 92.4 dB for the low-pass and band-pass system respectively, coupled with excellent immunities to fabrication tolerances and parameter mismatch.

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A High-Resolution Silicon-on-Glass $Z$ Axis Gyroscope Operating at Atmospheric Pressure

Cited by 36 publications

References 16 publications

Design and Implementation of an Optimized Double Closed-Loop Control System for MEMS Vibratory Gyroscope

Design and Implementation of an Optimized Double Closed-Loop Control System for MEMS Vibratory Gyroscope

Optimal Design of a Center Support Quadruple Mass Gyroscope (CSQMG)

Genetic Algorithm for the Design of Electro-Mechanical Sigma Delta Modulator MEMS Sensors

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