2023
DOI: 10.3390/mi14030654
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A High Sensitivity AlN-Based MEMS Hydrophone for Pipeline Leak Monitoring

Abstract: In this work, a miniaturized, low-cost, low-power and high-sensitivity AlN-based micro-electro-mechanical system (MEMS) hydrophone is proposed for monitoring water pipeline leaks. The proposed MEMS Hydrophone consists of a piezoelectric micromachined ultrasonic transducer (PMUT) array, an acoustic matching layer and a pre-amplifier amplifier circuit. The array has 4 (2 × 2) PMUT elements with a first-order resonant frequency of 41.58 kHz. Due to impedance matching of the acoustic matching layer and the 40 dB g… Show more

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Cited by 4 publications
(2 citation statements)
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“…Zhi Baoyu [59] and others developed an AlN-based MEMS hydrophone with miniaturization, low cost, low power consumption, and high sensitivity to monitor the leakage of water pipelines. Zaqretdinov Ayrat [60] and others analyzed the acoustic signals recorded from the pipeline surface under different leaks and water pressures and established a relationship between the size of the leakage and the Hurst index of the acoustic signals.…”
Section: Sound Sensormentioning
confidence: 99%
“…Zhi Baoyu [59] and others developed an AlN-based MEMS hydrophone with miniaturization, low cost, low power consumption, and high sensitivity to monitor the leakage of water pipelines. Zaqretdinov Ayrat [60] and others analyzed the acoustic signals recorded from the pipeline surface under different leaks and water pressures and established a relationship between the size of the leakage and the Hurst index of the acoustic signals.…”
Section: Sound Sensormentioning
confidence: 99%
“…After the completion of the design and production of the hydrophone should be the experimental verification of the hydrophone, first of all, the use of COMSOL simulation software for simulation verification. Eigenfrequency is an important indicator of the performance of the MEMS hydrophone, the upper limit of the actual measurement frequency of the hydrophone can not exceed the lowest order eigenfrequency of the MEMS hydrophone, and only in this way can the frequency response of the structure consistent and work stably [19].…”
Section: Hydrophone Simulation Verificationmentioning
confidence: 99%