A High-Sensitivity Mems Gravimeter without a Vacuum Chamber

Xu, Xiaochao; Wang, Qian; Tian, Ji'ao; Fang, Yanyan; Yang, Lujia; Zhao, Chun; Hu, Fangjing; Tu, Liangcheng

doi:10.1109/transducers50396.2021.9495620

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) 2021

DOI: 10.1109/transducers50396.2021.9495620

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A High-Sensitivity Mems Gravimeter without a Vacuum Chamber

Xiaochao Xu

Qian Wang

Ji'ao Tian

et al.

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A High-Sensitivity Mems Gravimeter without a Vacuum Chamber

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References 14 publications

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