A high-temperature dilatometer using optical heterodyne interferometry

Okaji, Masahiro; Imai, Hidetaka

doi:10.1088/0022-3735/20/7/013

Cited by 21 publications

(6 citation statements)

References 2 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In computational ghost imaging, there is only the bucket detector and the reference pattern is calculated from a known modulation [58] [59]. Interferometry has been used at high temperatures, and when performed properly is known to be accurate at 800 °C [60]. In one test, it was limited by the decomposition of a platinum-film mirror inside the furnace, at 725 °C [61].…”

Section: B High-resolution Full Field Techniquesmentioning

confidence: 99%

Micro Reactor Instrumentation and Control FY2019 Report

Mascareñas

Meyerhofer

Ezell

et al. 2019

View full text Add to dashboard Cite

Micro-reactors (i.e., very small transportable or mobile nuclear reactors with a capacity less than 20 MWt) are being developed to supply heat and power for various applications in remote areas, military installations, emergency operations, humanitarian missions, and disaster relief zones. A wide variety of reactor types are under consideration, including sodium-cooled fast reactors, molten salt reactors, light water reactors, very-high-temperature gas reactors, and heat pipe reactors. These miniaturized transportable reactor designs remain largely untested and unproven. System and component testing are needed to demonstrate design safety and system robustness, reliability and efficiency. 2. Concept of Operations for Instrumentation for the non-nuclear micro-reactor test bed.

show abstract

Section: B High-resolution Full Field Techniquesmentioning

confidence: 99%

Micro Reactor Instrumentation and Control FY2019 Report

Mascareñas

Meyerhofer

Ezell

et al. 2019

View full text Add to dashboard Cite

show abstract

“…The system is based on two key technologies. One is an optical heterodyne interferometer, which is the type of interferometer that provides the highest resolution [2][3][4][5] because it detects a change in sample length as a phase difference in light. The other is a double-path interferometer, which increases the sensitivity to changes in length by a factor of four and cancels out the tilt of a sample during measurement.…”

Section: Goal Of Our Researchmentioning

confidence: 99%

High-precision (<1ppb/°C) optical heterodyne interferometric dilatometer for determining absolute CTE of EUVL materials

2006

View full text Add to dashboard Cite

We have developed an optical-heterodyne-interferometric dilatometer tailored to meet EUVL requirements. The key feature is that it can measure the absolute coefficient of thermal expansion (CTE). The design of the dilatometer has been optimized to yield highly accurate, reproducible measurements by taking into consideration uncertainty factors and their contributions. A prototype was constructed and evaluated. To test its capabilities, we measured the CTEs of various materials, which had values ranging from ppm/°C to ppb/°C. All the measurements were successful, and we found that our dilatometer could handle a wide variety of materials, including low-thermal-expansion materials (LTEMs) for EUVL. Subsequently, a more detailed evaluation of the reproducibility of CTE measurements for titanium-doped silica glass was performed. The static reproducibility (σ) was 0.80 ppb/°C or better for a change of 1 ppb/°C in the target. The dynamic reproducibility, or in other words the resetability, was ±0.85 ppb/°C or better. Regarding measurement accuracy, our results are comparable to those obtained with the AIST dilatometer. From the first results, the CTE difference between AIST and ASET was 1.7 ppb/°C. We continue to improve accuracy of measurement. As a test of capability of our dilatometer, we made a CTE characterization for material development. It showed typical CTE character of LTEMs. We feel confident that our dilatometer will be useful for the measurement of the CTEs of EUVLgrade LTEMs.

show abstract

“…The dependence on temperature of o. can be expressed by a polynomial' a =a+b•t+c•t2 +dt3 +... . An alternative and more conuTlon representation is obtained from the Taylor series development of the length L L(t)= L0(1+a.t+g.t2 + (3) where a = a. = b12 and y = c13.…”

Section: Definition Of the Thermal Expansion Coefficientmentioning

confidence: 99%

“…The length change of the sample is measured by a differential plane mirror interferometer (HP 10715A). The use of a differential interferometer provides the optimum geometry for absolute dilatometrv 2,3 The optical interferometer acts in fact directly as the reference frame. i.e.…”

Section: Design Of the Interference Dilatometermentioning

confidence: 99%

<title>Thermal expansion measurement of gauge blocks</title>

Hou

Thalmann

1998

SPIE Proceedings

View full text Add to dashboard Cite

An instrument for the measurement of the thermal expansion coefficient near room temperature of gauge blocks and other samples of similar shape and size has been developed. The length dilatation is measured by a differential plane mirror interferometer. A special interference phase detection technique compensates for non-linearity errors caused by polarization mixing. In combination with an electronic phase meter this allows to achieve nanometer accuracy. Since the measurements are done in vacuum, no compensation for the refractive index of air has to be made. For samples with good thermal conductivity the slow heat exchange by thermal radiation allows for a small temperature gradient of the sample and a good stability in the thermal equilibrium. From the thermal expansion curve, measured in a temperature range typically between 10 °C and 30 °C, the linear and quadratic expansion coefficients are evaluated at 20°C, the reference temperature for length. It is shown, that for the investigated gauge block materials the room temperature expansion can be very accurately described with two coefficients within a few parts in iO per degree. A detailed analysis of the measurement uncertainty demonstrates the capability of the measurement instrument, which is continued by the results of an international comparison.

show abstract

A high-temperature dilatometer using optical heterodyne interferometry

Cited by 21 publications

References 2 publications

Micro Reactor Instrumentation and Control FY2019 Report

Micro Reactor Instrumentation and Control FY2019 Report

High-precision (<1ppb/°C) optical heterodyne interferometric dilatometer for determining absolute CTE of EUVL materials

<title>Thermal expansion measurement of gauge blocks</title>

Contact Info

Product

Resources

About