Reducing the phase transition temperature (Tc) of VO2 films to achieve the application in the field of Smart Home is still a challenge. Thus, in the work, the ultra‐thin VO2 films with different Mo doping amounts were successfully prepared by an economic sol‐gel method and atmosphere annealing, aiming to further investigate the mechanism of the decrease of Tc. The results show that the VO2 films with 3 at % Mo doping possess the Tc of 29.5 °C. Notedly, in the as‐prepared films, the maximum transmittance in the visible region (Tvis) is 46.3 % and the solar direct transmittance (Tsol) is 45.8 %. According to the XPS spectra, it is confirmed that the Mo doping prominently induces the valence change of V ions from +4 to +3, inhibiting the strain in the phase transition process of VO2 films, and leading to the decrease of Tc. Our work will provide a feasible solution for reducing the Tc of the ultra‐thin VO2 films.