A Highly Responsive Silicon Nanowire/Amplifier MOSFET Hybrid Biosensor

Abstract

This study demonstrates a hybrid biosensor comprised of a silicon nanowire (SiNW) integrated with an amplifier MOSFET to improve the current response of field-effect-transistor (FET)-based biosensors. The hybrid biosensor is fabricated using conventional CMOS technology, which has the potential advantage of high density and low noise performance. The biosensor shows a current response of 5.74 decades per pH for pH detection, which is 2.5 × 105 times larger than that of a single SiNW sensor. In addition, we demonstrate charged polymer detection using the biosensor, with a high current change of 4.5 × 105 with a 500 nM concentration of poly(allylamine hydrochloride). In addition, we demonstrate a wide dynamic range can be obtained by adjusting the liquid gate voltage. We expect that this biosensor will be advantageous and practical for biosensor applications which requires lower noise, high speed, and high density.

Evidences for redox reaction driven charge transfer and mass transport in metal-assisted chemical etching of silicon

“…In particular, silicon nanowires (NWs) find a wide array of usage in areas such as electronics12, photovoltaics34, energy storage5, optical devices67, catalysis8, drug delivery9, thermoelectrics10, as well as biological and chemical sensors111213. The importance of fabricating reliable Si nanowires has provided the motivation for the exploration of many different fabrication methods.…”

Pre-Clinical Tests of an Integrated CMOS Biomolecular Sensor for Cardiac Diseases Diagnosis

“…In this 2P4M technology, there are two poly-silicon layers and four metal layers. According to previous research reports [ 21 ], a low doping concentration semiconductor, compared to a high doping concentration semiconductor, has improved biosensing sensitivity. As a consequence, the second layer of poly-silicon (Poly 2) was selected and designed as the poly-Si biosensor due to the lower N-type doping level compared to the first layer of poly-silicon (Poly 1).…”

CMOS biosensors for in vitro diagnosis – transducing mechanisms and applications

“…With the advance of post-processing in standard CMOS chips, special field-effect transistor (FET) biosensors, which sense the charges of ions/electrons from the target, such as ion sensitive FETs (ISFETs) 35 and silicon nanowire (NW), 33,48 also show promise for biomolecule detection. Compared to the standard electrical-based biosensors shown in Fig.…”