2021
DOI: 10.1109/ted.2021.3073650
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A Highly Sensitive and Robust GaN Ultraviolet Photodetector Fabricated on 150-mm Si (111) Wafer

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Cited by 17 publications
(10 citation statements)
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“…Thus, the narrow channel width (10 µm) is necessary for the trap‐assisted PF mechanism to transport charge carriers when a low bias voltage (less than negative or positive 5 V) is applied. [ 51 ] Both defect‐free NWs and ultra‐long MWs samples had identical device structures and fabrication process parameters such as channel width and electrode thickness. The photoconductive performance of PDs is determined by photocurrent ( I Ph ) and photo‐to‐dark current ratio (PDCR), photoresponsivity ( R ), external quantum efficiency ( η ), and specific detectivity ( D * , unit: Jones = cm Hz 1/2 W −1 ), which can be expressed as [ 12,52 ] IPhbadbreak=IL0.33emgoodbreak−ID$$\begin{equation}{I}_{{\mathrm{Ph}}} = {I}_{\mathrm{L}}\ - {I}_{\mathrm{D}}\end{equation}$$ PDCR0.28embadbreak=IPhInormalD$$\begin{equation}{\rm{PDCR}}\; = {{{I}_{{\rm{Ph}}}} \over {{I}_{\rm{D}}}}\end{equation}$$ R0.33embadbreak=IPhPA0.33em$$\begin{equation}R\ = \frac{{{I}_{{\mathrm{Ph}}}}}{{PA}}\ \end{equation}$$ η0.33embadbreak=hceλ0.33emR0.33em$$\begin{equation}\eta \ = \frac{{hc}}{{e\lambda }}\ R\ \end{equation}$$ Dbadbreak=RA1/2()2eID1/2$$\begin{equation}{D}^* = \frac{{R{A}^{1/2}}}{{{{\left( {2e{I}_{\mathrm{D}}} \right)}}^{1/2}}}\end{equation}$$where I L , I D , P , A, h, c, e , and λ are light‐generated current, dark current, optical power density, active area of the channel (0.1 mm × 10 mm), Planck's constant, velocity of light, electron charge, and excited light wavelength (325 nm), respectively.…”
Section: Resultsmentioning
confidence: 99%
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“…Thus, the narrow channel width (10 µm) is necessary for the trap‐assisted PF mechanism to transport charge carriers when a low bias voltage (less than negative or positive 5 V) is applied. [ 51 ] Both defect‐free NWs and ultra‐long MWs samples had identical device structures and fabrication process parameters such as channel width and electrode thickness. The photoconductive performance of PDs is determined by photocurrent ( I Ph ) and photo‐to‐dark current ratio (PDCR), photoresponsivity ( R ), external quantum efficiency ( η ), and specific detectivity ( D * , unit: Jones = cm Hz 1/2 W −1 ), which can be expressed as [ 12,52 ] IPhbadbreak=IL0.33emgoodbreak−ID$$\begin{equation}{I}_{{\mathrm{Ph}}} = {I}_{\mathrm{L}}\ - {I}_{\mathrm{D}}\end{equation}$$ PDCR0.28embadbreak=IPhInormalD$$\begin{equation}{\rm{PDCR}}\; = {{{I}_{{\rm{Ph}}}} \over {{I}_{\rm{D}}}}\end{equation}$$ R0.33embadbreak=IPhPA0.33em$$\begin{equation}R\ = \frac{{{I}_{{\mathrm{Ph}}}}}{{PA}}\ \end{equation}$$ η0.33embadbreak=hceλ0.33emR0.33em$$\begin{equation}\eta \ = \frac{{hc}}{{e\lambda }}\ R\ \end{equation}$$ Dbadbreak=RA1/2()2eID1/2$$\begin{equation}{D}^* = \frac{{R{A}^{1/2}}}{{{{\left( {2e{I}_{\mathrm{D}}} \right)}}^{1/2}}}\end{equation}$$where I L , I D , P , A, h, c, e , and λ are light‐generated current, dark current, optical power density, active area of the channel (0.1 mm × 10 mm), Planck's constant, velocity of light, electron charge, and excited light wavelength (325 nm), respectively.…”
Section: Resultsmentioning
confidence: 99%
“…As for the MW structure‐based PD, the extracted photo‐response time ( τ Rise = 2.83 ms and τ Decay = 3.57 ms) is about 1.5 times shorter than that of the NW structure‐based PD despite of long transport path inside the MW structure. The response time is related to the separation and recombination of photo‐generated carriers, and due to the trap‐assisted transport paths by the PF effect, [ 50,51 ] the photo‐generated carriers can effectively be collected to the back‐to‐back electrodes through the paths under large electric fields.…”
Section: Resultsmentioning
confidence: 99%
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