A Highly Sensitive Fiber-Optic Microphone Based on Graphene Oxide Membrane

Wu, Yu; Yu, Caibin; Wu, Fan; Li, Chen; Zhou, Jinhao; Gong, Yuan; Rao, Yunjiang; Chen, Yuanfu

doi:10.1109/jlt.2017.2737639

Cited by 87 publications

(33 citation statements)

References 28 publications

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“…The Fabry-Parot cavity formed between fiber tip and cantilever will change its length under acoustic waves and be measured by fast demodulated white-light interferometry, then it will be converted into electrical signals. In more advanced sensing mechanisms, direct coupling between acoustic waves and light are performed to achieve high sensitivity and low noise detection [74,75]. Table 1 has given a comparison among MEMS microphone types.…”

Section: Mems Acoustic Sensormentioning

confidence: 99%

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

et al. 2019

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With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and perspectives of the future sensors and MEMS/NEMS. Starting from the issues of the MEMS fabrication, we introduced typical MEMS sensors for their applications in the Internet of Things (IoTs), such as MEMS physical sensor, MEMS acoustic sensor, and MEMS gas sensor. Toward the trends in intelligence and less power consumption, MEMS components including MEMS/NEMS switch, piezoelectric micromachined ultrasonic transducer (PMUT), and MEMS energy harvesting were investigated to assist the future sensors, such as event-based or almost zero-power. Furthermore, MEMS rigid substrate toward NEMS flexible-based for flexibility and interface was discussed as another important development trend for next-generation wearable or multi-functional sensors. Around the issues about the big data and human-machine realization for human beings’ manipulation, artificial intelligence (AI) and virtual reality (VR) technologies were finally realized using sensor nodes and its wave identification as future trends for various scenarios.

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Section: Mems Acoustic Sensormentioning

confidence: 99%

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

et al. 2019

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“…It is obvious that the system is concise and tight. The principle of the acoustic sensor has been described in other papers [ 24 , 25 , 26 ].…”

Section: Acoustic Sensormentioning

confidence: 99%

“…However, the cavity length varies with changes of the surrounding circumstances, especially as the temperature changes [ 24 ]. It is a fatal problem when the working point drifts away from the quadrature, which leads to a decrease in the sensitivity of the FFPC sensor.…”

Section: Introductionmentioning

confidence: 99%

Fabry–Perot Cavity Sensing Probe with High Thermal Stability for an Acoustic Sensor by Structure Compensation

Cheng

Zhou

Zou

2018

Sensors

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Fiber Fabry–Perot cavity sensing probes with high thermal stability for dynamic signal detection which are based on a new method of structure compensation by a proposed thermal expansion model, are presented here. The model reveals that the change of static cavity length with temperature only depends on the thermal expansion coefficient of the materials and the structure parameters. So, fiber Fabry–Perot cavity sensing probes with inherent temperature insensitivity can be obtained by structure compensation. To verify the method, detailed experiments were carried out. The experimental results reveal that the static cavity length of the fiber Fabry–Perot cavity sensing probe with structure compensation hardly changes in the temperature range of −20 to 60 °C and that the method is highly reproducible. Such a method provides a simple approach that allows the as-fabricated fiber Fabry–Perot cavity acoustic sensor to be used for practical applications, exhibiting the great advantages of its simple architecture and high reliability.

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“…Frequency of the acoustic waves among them extends from infrasound to ultrasonic and hence there are pressing needs to detect such wide band acoustic signal. Diaphragm-based fiber optic acoustic sensors have attracted much interest because of their high sensitivity [8]- [10], wide frequency band [11]- [13], and high dynamic range [14]. Several diaphragms have been used to detect acoustics waves, such as metal (silver [8], [15], gold [16], [17]), two dimension materials (graphene oxide [11]), graphene [12], [13], silicon nitride [18], [19], and polymer (PPESK [20], PET [21]- [23]).…”

Section: Introductionmentioning

confidence: 99%

High Sensitivity and High Stability Dual Fabry-Perot Interferometric Fiber-Optic Acoustic Sensor Based on Sandwich-Structure Composite Diaphragm

Zhang

Lü

et al. 2021

IEEE Photonics J.

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A dual Fabry-Perot (FP) interferometric fiber-optic acoustic sensor based on sandwich-structure composite diaphragm is proposed, where fixed phase difference is generated by two FP interferometers (FPIs) with different cavity length. An ellipse fitting differential cross multiplication (EF-DCM) interrogation process is applied for phase demodulation to overcome drawbacks of quadrature point based intensity demodulation, such as temperature drifting, optical power jitter and limited dynamic range. Besides, benefiting from the large area sandwich-structure composite diaphragm, high sensitivity and wide flat frequency response are obtained. Experimental results show that phase sensitivity is-121.11 dB re 1 rad/μPa@250 Hz and sensitivity fluctuation is below 0.8 dB between 2-250Hz. To prove the high stability of the demodulation system, acoustic signal test is performed at different wavelength and different optical power and a fluctuation below 3% is observed. Moreover, profiting from the dual FP sensor structure, the acoustic sensor is get rid of influence of temperature drifting which usually leads to variation of cavity length of fiber optic acoustic sensor. The proposed sensor structure also overcomes drawbacks of traditional dual wavelength demodulation such as extra noise introduced by erbium doped fiber amplifier (EDFA) and high cost.

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A Highly Sensitive Fiber-Optic Microphone Based on Graphene Oxide Membrane

Cited by 87 publications

References 28 publications

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

Fabry–Perot Cavity Sensing Probe with High Thermal Stability for an Acoustic Sensor by Structure Compensation

High Sensitivity and High Stability Dual Fabry-Perot Interferometric Fiber-Optic Acoustic Sensor Based on Sandwich-Structure Composite Diaphragm

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