A highly sensitive plasmonic refractive index sensor based on triangular resonator

Mahmud, Rabiul Al; Faruque, Md. Omar; Sagor, Rakibul Hasan

doi:10.1016/j.optcom.2020.126634

Cited by 59 publications

(17 citation statements)

References 39 publications

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“…These can significantly be used in applications such as sensing, timing and filtering and many more. In sensing applications, a given set of quantity can be measured with change in a resonant element [8], in timing applications, a resonant element is integrated with the electronics circuits to develop a high-quality signals [9], and in filtering applications, a resonant structure have filters that can be utilized for the RF wireless systems [10]. Various micro-electronics circuits can be distinguished from MEMS resonator as these circuits have compact, rigid structures and are generally solid whereas MEMS resonator may have defects in the form of holes, channels and cavity.…”

Section: Introductionmentioning

confidence: 99%

Si-based MEMS resonant sensor: A review from microfabrication perspective

Verma

Mondal

Gupta

2021

Microelectronics Journal

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With the technological advancement in micro-electro-mechanical systems (MEMS), microfabrication processes along with digital electronics together have opened novel avenues to the development of small-scale smart sensing devices capable of improved sensitivity with a lower cost of fabrication and relatively small power consumption. This article aims to provide the overview of the recent work carried out on the fabrication methodologies adopted to develop silicon based resonant sensors. A detailed discussion has been carried out to understand critical steps involved in the fabrication of the silicon-based MEMS resonator. Some challenges starting from the materials selection to the final phase of obtaining a compact MEMS resonator device for its fabrication have also been explored critically.

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Section: Introductionmentioning

confidence: 99%

Si-based MEMS resonant sensor: A review from microfabrication perspective

Verma

Mondal

Gupta

2021

Microelectronics Journal

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“…The MIM WG structure is dominant and offers several extraordinary attributes, such as stronger light confinement, smaller mode size, minimal bending loss, and less costly production expense which has revitalized the implementation of wide-ranging plasmonic devices based on such WG arrangement. Lately, numerous types of MIM WG structurebased plasmonic components are anticipated, such as optical filters [10,11], optical power splitters [12,13], light manipulation [14], and sensing devices [15][16][17][18].…”

Section: Introductionmentioning

confidence: 99%

Metal-Insulator-Metal Waveguide-Based Racetrack Integrated Circular Cavity for Refractive Index Sensing Application

et al. 2021

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Herein, a novel cavity design of racetrack integrated circular cavity established on metal-insulator-metal (MIM) waveguide is suggested for refractive index sensing application. Over the past few years, we have witnessed several unique cavity designs to improve the sensing performance of the plasmonic sensors created on the MIM waveguide. The optimized cavity design can provide the best sensing performance. In this work, we have numerically analyzed the device design by utilizing the finite element method (FEM). The small variations in the geometric parameter of the device can bring a significant shift in the sensitivity and the figure of merit (FOM) of the device. The best sensitivity and FOM of the anticipated device are 1400 nm/RIU and ~12.01, respectively. We believe that the sensor design analyzed in this work can be utilized in the on-chip detection of biochemical analytes.

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“…The MIM WG structure is dominant and offers several extraordinary attributes, for instance, stronger light confinement, smaller mode size, minimal bending loss and less costly production expense which has revitalized the implementation of wide-ranging plasmonic devices based on such WG arrangement. Lately, numerous types of MIM WG structure-based plasmonic components are anticipated, for instance, optical filters [10,11], optical power splitters [12,13], light manipulation [14], and sensing devices [15][16][17][18], and others.…”

Section: Introductionmentioning

confidence: 99%

Metal-Insulator-Metal Waveguide-Based Racetrack Integrated Circular Cavity for Refractive Index Sensing Application

Butt¹,

Kaźmierczak²,

Kazanskiy³

et al. 2021

Preprint

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Herein, a novel cavity design of racetrack integrated circular cavity established on metal-insulator-metal (MIM) waveguide is suggested for refractive index sensing application. Over the past few years, we have witnessed several unique cavity designs to improve the sensing performance of the plasmonic sensors created on the MIM waveguide. The optimized cavity design can provide the best sensing performance. In this work, we have numerically analyzed the device design by utilizing the finite element method (FEM). The small variations in the geometric parameter of the device can bring a significant shift in the sensitivity and FOM of the device. The best sensitivity and FOM of the anticipated device are 1400 nm/RIU and ~12.01, respectively. We believe that the sensor design analyzed in this work can be utilized in the on-chip detection of biochemical analytes.

show abstract

A highly sensitive plasmonic refractive index sensor based on triangular resonator

Cited by 59 publications

References 39 publications

Si-based MEMS resonant sensor: A review from microfabrication perspective

Si-based MEMS resonant sensor: A review from microfabrication perspective

Metal-Insulator-Metal Waveguide-Based Racetrack Integrated Circular Cavity for Refractive Index Sensing Application

Metal-Insulator-Metal Waveguide-Based Racetrack Integrated Circular Cavity for Refractive Index Sensing Application

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