2016
DOI: 10.1109/jsen.2015.2479295
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A Hybrid Vibration Powered Microelectromechanical Strain Gauge

Abstract: This paper reports the demonstration of an ultra-low power MEMS-CMOS oscillator for strain sensing, powered by a miniature piezoelectric vibration energy harvester (VEH). The employment of the Pierce oscillator topology in a MEMS-CMOS oscillator allows for minimisation of the power requirement to as low as 1.1 µW under ideal conditions. A VEH prototype, developed with hard PZT on a stainless steel substrate (∼0.4 cm 3 practical operational volume), is able to deliver a typical average power of 187 µW at 11.4 m… Show more

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Cited by 11 publications
(9 citation statements)
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“…For instance, stretch sensors can be mounted on a wearable device such as a prosthetic hand, data glove, or exoskeleton to provide vital information on the angular orientation of the joints, as illustrated in Figure 1. The use of traditional metallic and semiconducting techniques in this sensing field, though previously demonstrated [1][2][3], has limited potential due to the amount of stretch/strain that the device can undergo before fatigue, which in some areas might be well beyond the traditional strain sensor's capabilities. The term stretch and strain will be interchangeably used here.…”
Section: Introductionmentioning
confidence: 99%
“…For instance, stretch sensors can be mounted on a wearable device such as a prosthetic hand, data glove, or exoskeleton to provide vital information on the angular orientation of the joints, as illustrated in Figure 1. The use of traditional metallic and semiconducting techniques in this sensing field, though previously demonstrated [1][2][3], has limited potential due to the amount of stretch/strain that the device can undergo before fatigue, which in some areas might be well beyond the traditional strain sensor's capabilities. The term stretch and strain will be interchangeably used here.…”
Section: Introductionmentioning
confidence: 99%
“…Though, for consistency in order to enable comparison, this load resistance was fixed. For realistic applications, a dynamic control system needs to be employed to enable maximum power point tracking, which is available with commercial power conditioning elec- tronic chips such as LTC3588 that is popularly used for vibration energy harvesting [11,41].…”
Section: Vibration Data Responsementioning
confidence: 99%
“…The domain for such a low-profile, yet intrinsically flexible, is surging in wearable devices, such as prosthetic hands and wired gloves with artificial intelligence, to report the angular orientation of the joints. This trend has become widespread since conventional methods are limited by the strength of stretch before fatigue [38][39][40]. There is a high need for replacing traditional approaches for mechanical perturbation sensing using optical, for example, optical interferometry, or magnetic elements, for example, Hall-effect encoders, with highly accurate, low-cost, compact, and low-profile methods that are integrable with CMOS/MEMS technology.…”
Section: Introductionmentioning
confidence: 99%