A large-range compliant micropositioning stage with remote-center-of-motion characteristic for parallel alignment

Qu, Jingyao; Chen, Weihai; Chen, Wenjie

doi:10.1007/s00542-015-2485-8

Cited by 17 publications

(7 citation statements)

References 23 publications

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“…It has high flexibility and a good rotation angle, which can better reduce the energy loss during the operation of the amplifying mechanism, increase the amplification factor of the lever amplifying mechanism, and improve the overall output performance of the platform [27], as shown in Figure 2. Compared with other kinds of flexible amplifying mechanisms, the biggest advantage of the system is that it can keep a kinematic linear relationship between input and output in principle [28][29][30][31]. By placing the PZT (Model P-820.2B) into the amplifier, the overall size of the amplifying mechanism becomes smaller, the structure tends to be more miniaturized, and part of the parasitic motion is reduced, as shown in Figure 3.…”

Section: Mechanism Descriptionmentioning

confidence: 99%

Development of a 3-DOF Flexible Micro-Motion Platform Based on a New Compound Lever Amplification Mechanism

Cui

Qian

2021

Micromachines

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In this paper, a flexible micro-operation platform with three degrees of freedom, large stroke, and high precision is designed to meet the higher demands in the fields of biological engineering and medicine. The platform adopts a compound lever mechanism. The theoretical magnification of the mechanism is 9.627, the simulation magnification is 10.111, and the error is 5.02%. The platform uses a piezoelectric ceramic driver to increase the output stroke to obtain a larger movement space. The composite lever mechanism and new micro-operating platform are studied by theoretical calculation and finite element simulation. The results show that the new flexible micro-operating platform based on the composite lever mechanism has good motion decoupling and high precision.

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Section: Mechanism Descriptionmentioning

confidence: 99%

Development of a 3-DOF Flexible Micro-Motion Platform Based on a New Compound Lever Amplification Mechanism

Cui

Qian

2021

Micromachines

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“…In recent years, the micro-positioning technology plays an increasingly important role in microelectronics manufacturing, biomedical engineering, optical, micro-assembly, ultraprecision machining and other fields [1][2][3][4]. For example, in the field of biomedicine, the operational precision requirements of processing techniques such as cell separation, dissection, and extraction are constantly improving.…”

Section: Introductionmentioning

confidence: 99%

Proposal of an Equal-Stiffness and Equal-Stroke 2D Micro-Positioning Platform Driven by Piezoelectric Actuators

Sun

Hao

et al. 2020

Actuators

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Micro-positioning platform plays an important role in the field of precision positioning such as microelectronics, robotics and biomedicine. This paper proposes an equal-stiffness and equal-stroke 2D micro-positioning platform, which is driven by piezoelectric actuators. The overall structure of the 2D micro-positioning platform adopts a nested structure and the displacement magnification mechanism adopts two hourglass displacement magnification mechanisms. The displacement magnification ratio of the hourglass displacement magnification mechanism was studied, and its structural parameters were optimized. Static stiffness analysis and simulation analysis of the micro-positioning platform were carried out. The simulation stiffness of the micro-positioning platform in the XY direction is 46873 N/m and 46832 N/m respectively. The experimental prototype of the micro-positioning platform was built. Through the measurement experiment with the prototype, the maximum stroke of the micro-positioning platform in the XY direction is 489 μm and 493 μm respectively; the maximum coupling ratio in the XY direction is 2.38% and 2.70% respectively. The research indicates that the micro-positioning platform had the characteristics of small size, equal long stroke, equal stiffness and low coupling ratio in the XY direction.

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“…In recent years, micro/nano-positioning compliant platforms have experienced different structures ranging from a single degree-of-freedom (DOF) to multiple DOF due to their complete and essential application requirements. For example, Qu et al [ 12 ] presented a 1-DOF large-range flexure-based platform with a remote-center-of-motion characteristic, composed of an outer remote-center-of-motion (RCM) guiding mechanism inner output-stiffness enhanced lever amplifier. Jiang et al [ 13 ] developed an XY 2-DOF compliant positioning platform with stiffness modeling and performance analysis of input and output decoupling characteristics.…”

Section: Introductionmentioning

confidence: 99%

Dynamic Analysis and Experiment of 6-DOF Compliant Platform Based on Bridge-Type Amplifier

2020

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In this paper, we establish a dynamic model of a six-degrees-of-freedom (6-DOF) compliant positioning platform based on bridge-type amplifiers. Based on the elastic beam theory and energy relationship, we derived the bridge-type amplifier’s dynamic model using the Lagrange equation. Then, we established a dynamic model of the compliant platform based on the equivalent mass and equivalent stiffness of the bridge-type amplifier, and the analysis formula of the natural frequency was derived. Finally, the analytical models of natural frequencies of the bridge-type amplifier and the compliant platforms were verified using the finite element analysis (FEA) method. Through modal experiments, the damping ratio and natural frequency were identified. Step response experiments in the X/Y direction and Z direction were performed. The phenomenon that the experimental results appeared to match the theoretical calculations indicates that the dynamic model was accurate.

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A large-range compliant micropositioning stage with remote-center-of-motion characteristic for parallel alignment

Cited by 17 publications

References 23 publications

Development of a 3-DOF Flexible Micro-Motion Platform Based on a New Compound Lever Amplification Mechanism

Development of a 3-DOF Flexible Micro-Motion Platform Based on a New Compound Lever Amplification Mechanism

Proposal of an Equal-Stiffness and Equal-Stroke 2D Micro-Positioning Platform Driven by Piezoelectric Actuators

Dynamic Analysis and Experiment of 6-DOF Compliant Platform Based on Bridge-Type Amplifier

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