A laser-interferometer measuring displacement with nanometer resolution

Zagar, Bernhard G.

doi:10.1109/19.293440

Cited by 17 publications

(5 citation statements)

References 2 publications

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“…Bei Starrkörperbewegungen der Probe treten entsprechende Translationen aller vier Interferenzmuster auf. [7], um die Planität auch quantitativ erfassen zu können. Die Bilder 3 und 4 zeigen die entsprechenden Ergebnisse dieser Untersuchung.…”

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Höchstauflösendes Laser-Interferometer zur Dehnungsmessung

Zagar¹

1995

tm - Technisches Messen

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Schlagwörter: Dehnungsmessung, Rißaufweitungsmes-sung, Laser-Interferometer Ein höchstauflösender interferometrischer Dehnungssensor, der in der Lage ist, über einer Basislänge in der Größenordnung von etwa 100 μιη Änderungen im Abstand von an einer Probe angebrachten Marken von weniger als 100 μηι sicher zu erfassen, wird vorgestellt. Das Interferometer ist weitgehend unempfindlich auf Störun-gen mechanischer Art, welche an kommerziellen Zugprüfmaschinen kaum zu vermeiden sind. Meßergebnisse von Rißaufweitungsmessungen sowie die Ermittlung der Langzeitstabilität der Anordnung werden präsentiert. Very high resolving interferometric strain gageIn material science there are certain classes of problems that require strain measurement over base lengths as small as 100 μιη and still demand a resolution limit of about 10 microstrains. This paper presents an interferometric strain sensor that is able to cope with that demand. The optical principle is given and the digital signal processing involved is detailed. Furthermore, some experimental data for crack-tip opening displacement measurements on micro cracks and the measurement of the sensitivity of the sensor to rigid body motion of the specimen mounted to a tensile testing equipment is detailed.

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Section: Anbringen Der Markenunclassified

Höchstauflösendes Laser-Interferometer zur Dehnungsmessung

Zagar¹

1995

tm - Technisches Messen

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“…Achieving nanometer resolution over a wide bandwidth, however, is challenging due to the increase in sensor noise with bandwidth, which is the primary factor limiting the achievable resolution. Although several sensing schemes achieving nanometer resolution have been reported -such as eddy current-based [9], capacitive [10], interferometric [11], and inductive [12] -the bandwidth is limited to 10-20 kHz. Capacitive sensors have exhibited a resolution of 1 nm over a bandwidth of 100 kHz [13] and have been employed in several high-speed nanopositioners [14], [15]; however, the readout scheme is complex [16], rendering further improvements in bandwidth difficult and impractical [5].…”

Section: Introductionmentioning

confidence: 99%

Achieving Low-Noise, High-Bandwidth, Nanoscale-Resolution Position Sensing With GMR Sensors

Joseph

Kartik

2023

IEEE Trans. Instrum. Meas.

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This article presents a low-noise high-bandwidth giant magnetoresistance (GMR) sensor-readout circuit for nanometer resolution position sensing, a critical requirement in several precision applications such as Atomic Force Microscopy (AFM). The main impediment to performance is the GMR sensor's significantly higher 1/f noise extending over large bandwidths, thereby limiting the achievable SNR. Therefore, the sensing system needs to be designed at the system level in order to minimize excess intrinsic noise generation and transmission, as well as external noise pickup. The noise characteristics of the GMR sensor and its readout circuit components, and their effect on SNR, are investigated analytically and experimentally. A general process for designing the readout circuit, applicable not just to GMR sensors but also to other high-1/f-noise sensors, is presented. A resolution of 2.5 nm over a bandwidth of 100 kHz is demonstrated on an AFM nanopositioner, a ten-fold improvement over previously reported GMR sensor performance and comparable to the state-of-the-art, but more complex, capacitive sensors. The readout scheme is simple to implement using COTS components and easily extendable to even higher bandwidths, unlike other schemes, such as modulation/demodulation, where the requirement for increasingly higher carrier frequencies renders further improvements in bandwidth impractical.

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“…Interferometric systems play an important role in measuring the extent of displacement [1,2]. With this system, nanometer and smaller displacements can be measured precisely [3,4].…”

Section: Introductionmentioning

confidence: 99%

A Study on Performance Effects of Standard and Stabilized He-Ne Lasers in an Interferometric Measurement System

Böcekçi

2016

Acta Phys. Pol. A

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Stabilized He-Ne lasers are commonly utilized in interferometric systems, and provide easy and accurate results. The main reason for their extensive use is their output beam's strength and stability. However, these are relatively high in cost. In interferometric measurement systems, standard He-Ne lasers can also be used. This type of lasers has a lower cost, but their output beam strength can fluctuate in time. And this in turn adversely affects the measurement performance. In this study, a standard He-Ne and a stabilized He-Ne lasers were used in the same measurement system. The measurement errors caused by the fluctuation of the output beam of the standard He-Ne laser are minimized by using a video processing technique. When the obtained results were compared with the ideal values, the relative error for the system with the stabilized He-Ne laser was recorded as 0.2%, while for the system with the standard He-Ne laser a relative error rate of 0.3% was achieved. When the results are analyzed, it is evident that in measurement systems with a standard He-Ne laser, the system performance can be boosted with a video processing technique, and that its results can achieve values closer to the performance of stabilized He-Ne lasers.

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A laser-interferometer measuring displacement with nanometer resolution

Cited by 17 publications

References 2 publications

Höchstauflösendes Laser-Interferometer zur Dehnungsmessung

Höchstauflösendes Laser-Interferometer zur Dehnungsmessung

Achieving Low-Noise, High-Bandwidth, Nanoscale-Resolution Position Sensing With GMR Sensors

A Study on Performance Effects of Standard and Stabilized He-Ne Lasers in an Interferometric Measurement System

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