A lateral field excited acoustic wave biosensor

York, Carly A.; French, L.A.; Millard, Paul J.; Vetelino, J.F.

doi:10.1109/ultsym.2005.1602792

Cited by 23 publications

(14 citation statements)

References 8 publications

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“…An additional constraint applied to resonators used for sensor applications is that they possess frequency stability under a set of operating conditions. Recent work has investigated LFE sensors fabricated on AT-cut quartz operating at 25°C [6][7][8]. For this cut, the PSM has a zero temperature coefficient of frequency (TCF) and can be selectively excited.…”

Section: Lfe Sensor Requirementsmentioning

confidence: 99%

“…Efforts have been made to increase the fringing interactions in TFE resonators [4,5], but the sensing surface in these devices still has an electrode. Recent reports have noted progress in the development of LFE sensors [6][7][8].…”

Section: Introductionmentioning

confidence: 99%

“…This work has been performed using the well-known AT cut of α-quartz [6][7][8]. The choice of the AT cut of quartz has allowed direct comparison to TFE devices of the same material, particularly the quartz crystal microbalance (QCM) [9].…”

Section: Introductionmentioning

confidence: 99%

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Lateral field excited LiTaO<inf>3</inf> acoustic wave sensing platform

McGann

McCann

Vetelino

2010

2010 IEEE International Ultrasonics Symposium

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Figure 1 (a) Top view (sensing surface) of a standard QCM sensor and (b) top view (sensing surface) of a LFE sensor; shaded and dotted regions are gold. Dotted regions indicate reference (bottom) side while shaded regions indicate sensing (top) side Abstract-AT-cut quartz is the standard material used in the quartz crystal microbalance (QCM) due to the existence of a temperature compensated pure transverse shear mode (TSM). In the QCM the TSM is excited by electrodes on both the top and bottom surfaces of the quartz wafer resulting in what is called thickness field excitation. When used for sensor applications the QCM has several deficiencies.First, quartz is weakly piezoelectric and second the sensing surface has deposited metal electrodes which can interfere with the detection of a target analyte. Another common piezoelectric crystal, LiTaO 3 , offers an interesting alternative since it has significantly higher piezoelectric coupling than quartz and the possibility of realizing a temperature compensated TSM. Further the TSM can be excited by lateral field excitation (LFE) which leaves the top surface bare. It is the purpose of this paper to theoretically and experimentally investigate the potential of using LiTaO 3 as a new LFE BAW sensor platform.

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Section: Lfe Sensor Requirementsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Lateral field excited LiTaO<inf>3</inf> acoustic wave sensing platform

McGann

McCann

Vetelino

2010

2010 IEEE International Ultrasonics Symposium

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“…4, which is two orders of magnitude lower than the detection limit of the LFE and QCM [12]. Since the MSCAT is capable of operating at frequencies in excess of 400 MHz [9] it is expected that even greater sensitivities can be achieved.…”

Section: Lfe and Mscat Immunosensotrsmentioning

confidence: 99%

Novel transducer configurations for bulk acoustic wave sensors

et al. 2008

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Figure 1. (a) Top view (sensing surface) of a standard QCM sensor; (b) Bottom view (reference surface) of a LFE sensor; (c)Bottom view (reference surface) of a MSCAT sensor. Shaded and dotted regions are gold and all dimensions are in mm.Abstract-Two novel transducer configurations for bulk acoustic wave (BAW) sensors have been developed. In the first sensor, called the lateral field excited (LFE) sensor, the transverse shear mode (TSM) in AT-cut quartz is excited by two electrodes on the reference surface resulting in a bare sensing surface which allows both electrical and mechanical properties of target analytes to be measured. In the second sensor, called the monolithic spiral coil acoustic transduction (MSCAT) sensor, the TSM is excited by a photolithographically deposited spiral antenna on the reference surface which can excite high order harmonics in the substrate, which can lead to increased sensitivity. In order to demonstrate the applicability and advantages of the LFE and MSCAT sensor platforms, the sensors' responses to chemical and biological target analytes were examined and compared to the responses of a standard quartz crystal microbalance (QCM).

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“…1d) and application of this sensor to detect phosmet and E. coli. are described elsewhere [3][4][5][6]. In contrast to the QCM and LFE sensors which are excited by two electrodes, a hand wound spiral coil has been used as the excitation source in two other acoustic wave sensors, namely the Magnetic Acoustic Resonant Sensor (MARS) [7][8][9][10][11][12] and the Electromagnetic Piezoelectric Acoustic Transduction Sensor (EMPAS) [12][13][14][15][16][17].…”

Section: Introductionmentioning

confidence: 99%

3I-4 A Monolithic Spiral Coil Acoustic Transduction Sensor

Vetelino

McCann

Flewelling

et al. 2006

2006 IEEE Ultrasonics Symposium

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A monolithic spiral coil acoustic transduction (MSCAT) sensor that combines and improves upon the positive features of other acoustic wave sensors has been developed. The MSCAT sensor consists of an AT-cut quartz substrate that has a bare sensing surface and a photolithographically deposited multiturn gold spiral coil on the opposite surface. The spiral coil acts as an antenna that radiates a time varying electric field that penetrates into the AT-quartz wafer. As a result of the piezoelectric effect, the time varying electric field sets up a time varying stress in the wafer. The MSCAT sensor can operate at high frequencies by efficiently exciting high harmonics with the application of a high frequency RF signal to the spiral coil. It is shown that resonant acoustic waves up to the 63 rd order harmonic can be efficiently excited. The MSCAT sensor was used to measure the viscosity of corn syrup. When compared to the performance of the standard quartz crystal monitor (QCM), the MSCAT sensor was found to be over three times more sensitive to viscosity changes. Finally, the MSCAT sensor was shown to be capable of detecting conductivity changes in liquids.

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A lateral field excited acoustic wave biosensor

Cited by 23 publications

References 8 publications

Lateral field excited LiTaO<inf>3</inf> acoustic wave sensing platform

Lateral field excited LiTaO<inf>3</inf> acoustic wave sensing platform

Novel transducer configurations for bulk acoustic wave sensors

3I-4 A Monolithic Spiral Coil Acoustic Transduction Sensor

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