A lateral symmetrically bistable buckled beam

Vangbo, Mattias; Bäcklund, Ylva

doi:10.1088/0960-1317/8/1/005

Cited by 73 publications

(56 citation statements)

References 9 publications

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“…They all have small H/h ratios, and some have snap-through and some do not. Clamping two or several curved beams together at their centers are demonstrated to be an effective method of constraining the second mode [16], [19], [22]. However, with the participation of the second mode in motion or deflection, the snap-through can still occur for shallow [7] or deep arch [13], [14].…”

Section: Resultsmentioning

confidence: 99%

“…In that sense, the structure is reconfigured by exerting a force but consuming no power, and powering is not a trivial thing in the world of micromechanics [16]. Various microdevices such as actuator [16], [19]- [24], microvalve [17], and transducer [18] utilizing the snap-through instability have been reported. In microelectromechanical systems (MEMS), another instability called pull-in also plays a very important role in MEMS device performance and design [25]- [31].…”

Section: Introductionmentioning

confidence: 99%

“…When pull-in happens, the MEMS structure collapses and may adhere to the structure, which results in the failure of the system. In the aforementioned archshaped or V-shaped structures, the transverse force exerted on those structures is either mechanical [1]- [16], [18], [19], [22], [23], thermal [17], optical [20], [21], or electromagnetic [24]. Those loadings above are all independent of the deflection/ displacement of the structure; snap-through occurs but pull-in does not in those structures (modeling).…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Snap-Through and Pull-In Instabilities of an Arch-Shaped Beam Under an Electrostatic Loading

Yin¹,

Wang

et al. 2007

J. Microelectromech. Syst.

106

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Abstract-The snap-through and pull-in instabilities of the micromachined arch-shaped beams under an electrostatic loading are studied both theoretically and experimentally. The pull-in instability that results in a system collision with an electrode substrate may lead to a system failure and, thus, limits the system maximum displacement. The beam/plate structure with a flat initial configuration under an electrostatic loading can only experience the pull-in instability. With the different arch configurations, the structure may experience either only the pull-in instability or the snap-through and pull-in instabilities together. As shown in our computation and experiment, those arch-shaped beams with the snap-through instability have the larger maximum displacement compared with the arch-shaped beams with only the pull-in stability and those with the flat initial configuration. The snapthrough occurs by exerting a fixed load, and the structure experiences a discontinuous displacement jump without consuming power. Furthermore, after the snap-through jump, the structures are demonstrated to have the capacity to withstand further electrostatic loading without pull-in. Those properties of consuming no power and increasing the structure deflection range without pull-in is very useful in microelectromechanical systems design, which can offer better sensitivity and tuning range.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Snap-Through and Pull-In Instabilities of an Arch-Shaped Beam Under an Electrostatic Loading

Yin¹,

Wang

et al. 2007

J. Microelectromech. Syst.

106

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“…Research coordinated under Dubowsky has produced the design of a reconfigurable robotic arm based on similar physical principles [Hafez, 2002;Wingert, 2002]. Many designs incorporating bistability use the concept of buckling [Schomburg, 1998;Vangbo, 1998]. Saif presents an extensive analysis of a buckled beam used as a bistable device while discussing the ability to tune the threshold force that moves the beam from one buckled state to the other [Saif, 2000].…”

Section: Multistable Equilibrium Structures and Systemsmentioning

confidence: 99%

On the Design Synthesis of Multistable Equilibrium Systems

King¹,

Campbell

Beaman

2004

Volume 1: 30th Design Automation Conference

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Multistable equilibrium (MSE) systems are a type of adaptable system that can have multiple mechanical configurations requiring no power to maintain the stable configurations. Thus, power is only needed to move among the stable states, and each stable configuration represents a level of adaptability. Since stable equilibrium configurations can be defined by potential energy minima, we base the design of MSE systems on shaping the potential energy curve at desired equilibrium configurations. This view allows one to construct a performance space defined by how well candidate systems meet a desired potential energy curve. By using a Monte Carlo mapping to link the performance space to the design space in tandem with stochastic optimization methods, the designer determines whether or not a certain system topology can be designed as a MSE system. Qualitative and quantitative mapping procedures enable the designer to decide whether or not the desired design lies near the center or periphery of a performance space. This dictates how the optimization is to be executed which in turn informs the designer as to whether or not a feasible limit in the system performance has indeed been reached.

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“…One of the ways to fabricate such bistable devices is the residual compressive stress buckling. 5,6 The fabrication process we have employed is very likely to introduce such an effect. The hypothesis is here confirmed, and the value of the residual stress at different stages of the fabrication is calculated.…”

Section: Introductionmentioning

confidence: 99%

Evaluating the compressive stress generated during fabrication of Si doubly clamped nanobeams with AFM

Lorenzoni

Llobet

Gramazio

et al. 2016

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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In this work, the authors employed Peak Force tapping and force spectroscopy to evaluate the stress generated during the fabrication of doubly clamped, suspended silicon nanobeams with rectangular section. The silicon beams, released at the last step of fabrication, present a curved shape that suggests a bistable buckling behavior, typical for structures that retain a residual compressive stress. Both residual stress and Young's modulus were extracted from experimental data using two different methodologies: analysis of beam deflection profiles and tip-induced mechanical bending. The results from the two methods are compared, providing an insight into the possible limitations of both methods.

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A lateral symmetrically bistable buckled beam

Cited by 73 publications

References 9 publications

Snap-Through and Pull-In Instabilities of an Arch-Shaped Beam Under an Electrostatic Loading

Snap-Through and Pull-In Instabilities of an Arch-Shaped Beam Under an Electrostatic Loading

On the Design Synthesis of Multistable Equilibrium Systems

Evaluating the compressive stress generated during fabrication of Si doubly clamped nanobeams with AFM

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