A load cell with adjustable stiffness and zero offset tuning dedicated to electrical micro- and nanoprobing

Smreczak, M.; Tissot-Daguette, Loïc; Thalmann, Etienne; Baur, Charles; Henein, Simon

doi:10.1016/j.precisioneng.2022.03.009

Cited by 5 publications

(2 citation statements)

References 37 publications

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“…Flexure pivots are commonly used in precision mechanisms as they can provide an accurate and repeatable rotation of mechanical elements. Their absence of solid friction, wear, lubrification and backlash and the possibility of monolithic manufacturing makes flexure pivots highly beneficial for microand nanopositioning systems [1][2][3][4], surgical instruments [5][6][7], space applications [8][9][10] and horological oscillators [11][12][13][14].…”

Section: Introductionmentioning

confidence: 99%

Zero Parasitic Shift Pivoting Kinematic Structures Based on Coupled n-RRR Planar Parallel Mechanisms for Flexure Pivot Design

Tissot-Daguette,

Thalmann,

Cosandier

et al. 2023

Volume 8: 47th Mechanisms and Robotics Conference (MR)

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Flexure pivots, which are widely used for precision mechanisms, generally have the drawback of presenting parasitic shifts accompanying their rotation. The known solutions for canceling these undesirable parasitic translations usually induce a loss in radial stiffness, a reduction of the angular stoke, and a nonlinear moment-angle characteristics. This article introduces a novel family of kinematic structures based on coupled n-RRR planar parallel mechanisms which presents exact zero parasitic shifts, while alleviating the drawbacks of some known pivoting structures. Based on this invention, three symmetrical architectures have been designed and implemented as flexure-based pivots. The performance of the newly introduced pivots has been compared via Finite Element models with that of two known planar flexure pivots having theoretically zero parasitic shift. The results show that the newly introduced flexure pivots are an order of magnitude radially stiffer than the considered pivots from the state of the art, while having zero parasitic shift properties and equivalent angular strokes. These advantages are key to applications such as mechanical time bases, surgical robotics, or optomechanical mechanisms. Polymer mockups and a titanium alloy prototype have been manufactured for future experimental validation.

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Section: Introductionmentioning

confidence: 99%

Zero Parasitic Shift Pivoting Kinematic Structures Based on Coupled n-RRR Planar Parallel Mechanisms for Flexure Pivot Design

Tissot-Daguette,

Thalmann,

Cosandier

et al. 2023

Volume 8: 47th Mechanisms and Robotics Conference (MR)

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show abstract

“…are widely used in MEMS as compliant bistable mechanisms. Several mechanisms with interesting behavior at small and large scales have been developed, relying on the special stiffness behavior of pre-shaped beams 27 , including negative stiffness mechanisms 28 , zero-force mechanisms 29 , tunable stiffness mechanisms 30 , large-stroke mechanisms 31 , metamaterials 32 , safe manipulation 33 , accurate positioning 34 , and high sensitivity sensors 21 .…”

Section: Introductionmentioning

confidence: 99%

Near-zero stiffness accelerometer with buckling of tunable electrothermal microbeams

Hussein,

Wang,

Esteves

et al. 2023

Preprint

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Pre-shaped microbeams, curved or inclined, are widely used in MEMS for their interesting stiffness properties. These mechanisms allow a wide range of positive and negative stiffness tuning in their direction of motion. A mechanism of pre-shaped beams with opposite curvature, connected in a parallel configuration, can be electrothermally tuned to reach a near-zero or negative stiffness behavior at the as-fabricated position. The simple structure helps incorporate the tunable spring mechanism in different designs for accelerometers, even with different transduction technologies. The sensitivity of the accelerometer can be considerably increased or tuned for different applications by electrothermally changing the stiffness of the spring mechanism. Opposite inclined beams are implemented in a capacitive micromachined accelerometer. The measurements on fabricated prototypes showed more than 55 times gain in sensitivity compared to their initial sensitivity. The experiments showed promising results in enhancing the resolution of acceleration sensing and the potential to reach unprecedent performance in micromachined accelerometers.

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Compliant variable negative to zero to positive stiffness twisting elements

Amoozandeh Nobaveh,

Herder,

Radaelli

2024

Mechanism and Machine Theory

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A load cell with adjustable stiffness and zero offset tuning dedicated to electrical micro- and nanoprobing

Cited by 5 publications

References 37 publications

Zero Parasitic Shift Pivoting Kinematic Structures Based on Coupled n-RRR Planar Parallel Mechanisms for Flexure Pivot Design

Zero Parasitic Shift Pivoting Kinematic Structures Based on Coupled n-RRR Planar Parallel Mechanisms for Flexure Pivot Design

Near-zero stiffness accelerometer with buckling of tunable electrothermal microbeams

Compliant variable negative to zero to positive stiffness twisting elements

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