A Low Cost Angular Rate Sensor in Si-Surface Micromachining Technology for Automotive Application

Thomae, A.; Schellin, R.; Lang, Markus; Bauer, W.; Mohaupt, J.; Bischopink, G.; Tanten, L.; Baumann, H.; Emmerich, H.; Pinter, Stefan; Marek, Jiří; Funk, K.; Lorenz, G.; Neul, Reinhard

doi:10.4271/1999-01-0931

Search citation statements

Order By: Relevance

Paper Sections

Select...

Micro-gyroscope Application In Commercial Market1

Citation Types

Supporting

Mentioning

Contrasting

Year Published

1999

2015

Publication Types

Select...

Book4

Article1

Other1

Relationship

Self Cite0

Independent6

Authors

Journals

Cited by 10 publications

(1 citation statement)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The metal cylinder was replaced in 1998 by [107]. Series production of a rollover gyroscope sensor developed by Bosch [108] had already started in 2001. Since then, Bosch has released two generations of rollover gyroscopes for production [109].…”

Section: Micro-gyroscope Application In Commercial Marketmentioning

confidence: 99%

The development of micro-gyroscope technology

Zhang¹,

Chen²,

Li³

et al. 2009

J. Micromech. Microeng.

202

View full text Add to dashboard Cite

This review reports an overview and development of micro-gyroscope. The review first presents different types of micro-gyroscopes. Micro-gyroscopes in this review are categorized into Coriolis gyroscope, levitated rotor gyroscope, Sagnac gyroscope, nuclear magnetic resonance (NMR) gyroscope according to the working principle. Different principles, structures, materials, fabrications and control technologies of micro-gyroscopes are analyzed. This review compares different classes of gyroscopes in the aspects such as fabrication method, detection axis, materials, size and so on. Finally, the review evaluates the key technologies on how to improve the precision and anti-jamming ability and to extend the available applications of the gyroscopes in the market and patents as well.

show abstract

Section: Micro-gyroscope Application In Commercial Marketmentioning

confidence: 99%