2023
DOI: 10.1016/j.ceramint.2022.10.103
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A low-cost multilayer piezoelectric actuator for ultrasonic motor stator driving fabricated by a low-temperature co-fired ceramic process

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Cited by 10 publications
(2 citation statements)
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“…For instance, micromotors based on multilayer piezoelectric actuators benefit from their shorter stabilization time, lower driving voltage, easier miniaturization and integration, and higher reliability compared to their monolayer counterparts. [ 166 ]…”
Section: Manufacturing Stage—low‐temperature Fabrication Of Piezocera...mentioning
confidence: 99%
“…For instance, micromotors based on multilayer piezoelectric actuators benefit from their shorter stabilization time, lower driving voltage, easier miniaturization and integration, and higher reliability compared to their monolayer counterparts. [ 166 ]…”
Section: Manufacturing Stage—low‐temperature Fabrication Of Piezocera...mentioning
confidence: 99%
“…The inchworm drive motors are modeled by the unique crawling principle of the insect inchworm, and are driven by the alternating mode of "Clamping-Drive-Clamping", which has a large driving force and a large stroke, but they also have a large volume, complex structure, and slow movement speed [1][2]. Ultrasonic drive motors are driven by elliptical friction under the action of applied ultrasonic voltage, with fast speed and self-locking characteristics of power failure, but they have high requirements for the drive signal and serious heating problems caused by friction and wear [3][4]. The stick-slip drive motors adopt an asymmetric drive wave (sawtooth wave signal), and utilize the difference between the maximum static friction and sliding friction to drive by inertia, with a simple principle of motion, compact structure, and a motion speed between the inchworm motors and ultrasonic motors [5][6][7][8].…”
Section: Introductionmentioning
confidence: 99%