A low loss flexural plate wave (FPW) device through enhanced properties of sol–gel PZT (52/48) thin film and stable TiN-Pt bottom electrode

Sekhar, Praveen Kumar; Akella, Sriram; Bhansali, Shekhar

doi:10.1016/j.sna.2006.07.020

Search citation statements

Order By: Relevance

Paper Sections

Select...

Introduction1

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2008

2009

Publication Types

Select...

Article2

Book1

Relationship

Self Cite0

Independent3

Authors

Journals

Cited by 3 publications

(1 citation statement)

References 22 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…EXPERIMENTAL Four 2" Si wafers of n-type, each housing 8 ultra thin (2 µm) Si membranes were used for the experiments. The diaphragms were fabricated through timed wet etching [3] with a thick layer of silicon oxide as the mask. The wafers were then ion implanted with H 2 at two energies (100, 125 keV) and four dose levels (1E16, 3E16, 1E17 and 3E17 ions/cm 2 ).…”

Section: Introductionmentioning

confidence: 99%

A Single Use Microvalve for Implantable Drug Delivery Applications

Sekhar¹,

Belay²,

Elliman³

et al. 2009

Meet. Abstr.

View full text Add to dashboard Cite

show abstract

Section: Introductionmentioning

confidence: 99%

A Single Use Microvalve for Implantable Drug Delivery Applications

Sekhar¹,

Belay²,

Elliman³

et al. 2009

Meet. Abstr.

View full text Add to dashboard Cite

show abstract

Diamond: a material for acoustic devices

Mortet

Williams

Haenen

2008

Physica Status Solidi (a)

View full text Add to dashboard Cite

Diamond has been foreseen to replace silicon for high power, high frequency electronic applications or for devices that operates in harsh environments. However, diamond electronic devices are still in the laboratory stage due to the lack of large substrates and the complexity of diamond doping. On another hand, surface acoustic wave filters based on diamond are commercially available. Diamond is especially suited for acoustic applications because of its exceptional mechanical properties. The other properties of diamond such as bio‐inertness and chemical stability certainly make of diamond a key material for the next generation of acoustic sensors. In this article, we try to detail the interest of diamond films in composite acoustic applications and review the different type of acoustic devices/sensors. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

show abstract