A Low-Noise High-Order Mode-Localized MEMS Accelerometer

Zhang, Hemin; Sobreviela, Guillermo; Pandit, Milind; Chen, Dongyang; Sun, Jiangkun; Parajuli, Madan; Zhao, Chun; Seshia, Ashwin A.

doi:10.1109/jmems.2021.3057260

Cited by 20 publications

(8 citation statements)

References 15 publications

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“…The amplitudes of the two resonators are almost identical. The frequencies of the two vibration modes are also close, which implies a high sensitivity 34 .…”

Section: Resultsmentioning

confidence: 92%

Micromechanical mode-localized electric current sensor

Zhang

et al. 2022

Microsyst Nanoeng

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This paper outlines the design of a novel mode-localized electric current sensor based on a mechanically sensitive element of weakly coupled resonator systems. With the advantage of a high voltage sensitivity of weakly coupled resonator systems, the current under test is converted to voltage via a silicon shunt resistor, which causes stiffness perturbation to one resonator. The mode-localization phenomenon alters the energy distribution in the weakly coupled resonator system. A theoretical model of current sensing is established, and the performance of the current sensor is determined: the sensitivity of the electric current sensor is 567/A, the noise floor is 69.3 nA/√Hz, the resolution is 183.6 nA, and the bias instability is 81.6 nA. The mode-localized electric current sensor provides a new approach for measuring sub-microampere currents for applications in nuclear physics, including for photocurrent signals and transistor leakage currents. It could also become a key component of a portable mode-localized multimeter when combined with a mode-localized voltmeter. In addition, it has the potential for use in studying sensor arrays to achieve higher resolution.

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“…The amplitudes of the two resonators are almost identical. The frequencies of the two vibration modes are also close, which implies a high sensitivity 34 .…”

Section: Resultsmentioning

confidence: 92%

Micromechanical mode-localized electric current sensor

Zhang

et al. 2022

Microsyst Nanoeng

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“…Compared to the lower-order mode, the higher-order mode shows a lower AR scale factor with respect to the acceleration because of the higher coupling factor 43 , as demonstrated in Fig. 1g .…”

Section: Resultsmentioning

confidence: 97%

Mode-localized accelerometer in the nonlinear Duffing regime with 75 ng bias instability and 95 ng/√Hz noise floor

Zhang

Pandit²,

Sobreviela³

et al. 2022

Microsyst Nanoeng

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Mode-localized sensors have attracted attention because of their high parametric sensitivity and first-order common-mode rejection to temperature drift. The high-fidelity detection of resonator amplitude is critical to determining the resolution of mode-localized sensors where the measured amplitude ratio in a system of coupled resonators represents the output metric. Operation at specific bifurcation points in a nonlinear regime can potentially improve the amplitude bias stability; however, the amplitude ratio scale factor to the input measurand in a nonlinear regime has not been fully investigated. This paper theoretically and experimentally elucidates the operation of mode-localized sensors with respect to stiffness perturbations (or an external acceleration field) in a nonlinear Duffing regime. The operation of a mode-localized accelerometer is optimized with the benefit of the insights gained from theoretical analysis with operation in the nonlinear regime close to the top critical bifurcation point. The phase portraits of the amplitudes of the two resonators under different drive forces are recorded to support the experimentally observed improvements for velocity random walk. Employing temperature control to suppress the phase and amplitude variations induced by the temperature drift, 1/f noise at the operation frequency is significantly reduced. A prototype accelerometer device demonstrates a noise floor of 95 ng/√Hz and a bias instability of 75 ng, establishing a new benchmark for accelerometers employing vibration mode localization as a sensing paradigm. A mode-localized accelerometer is first employed to record microseismic noise in a university laboratory environment.

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“…These resonators feature manufacturing processes that are compatible with mainstream integrated circuit technology. Among them, FMRs have gained extensive application across diverse fields due to their miniature, precise, and efficient performance [8][9][10][11].They are extensively used in microelectronics [12,13], micromechanics [14,15], biomedicine [16,17], and chemical sensing [18,19], providing significant technical support for research and development in these areas. FMRs can be classified into groups of electrostatic excitation [20], electromagnetic excitation [21], piezoelectric excitation [7], and thermal excitation [22] based on the mode of excitation.…”

Section: Introductionmentioning

confidence: 99%

Flexural-Mode Piezoelectric Resonators: Structure, Performance, and Emerging Applications in Physical Sensing Technology, Micropower Systems, and Biomedicine

Cai,

Wang,

Cao

et al. 2024

Sensors

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Piezoelectric material-based devices have garnered considerable attention from scientists and engineers due to their unique physical characteristics, resulting in numerous intriguing and practical applications. Among these, flexural-mode piezoelectric resonators (FMPRs) are progressively gaining prominence due to their compact, precise, and efficient performance in diverse applications. FMPRs, resonators that utilize one- or two-dimensional piezoelectric materials as their resonant structure, vibrate in a flexural mode. The resonant properties of the resonator directly influence its performance, making in-depth research into the resonant characteristics of FMPRs practically significant for optimizing their design and enhancing their performance. With the swift advancement of micro-nano electronic technology, the application range of FMPRs continues to broaden. These resonators, representing a domain of piezoelectric material application in micro-nanoelectromechanical systems, have found extensive use in the field of physical sensing and are starting to be used in micropower systems and biomedicine. This paper reviews the structure, working principle, resonance characteristics, applications, and future prospects of FMPRs.

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A Low-Noise High-Order Mode-Localized MEMS Accelerometer

Cited by 20 publications

References 15 publications

Micromechanical mode-localized electric current sensor

Micromechanical mode-localized electric current sensor

Mode-localized accelerometer in the nonlinear Duffing regime with 75 ng bias instability and 95 ng/√Hz noise floor

Flexural-Mode Piezoelectric Resonators: Structure, Performance, and Emerging Applications in Physical Sensing Technology, Micropower Systems, and Biomedicine

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