A Low-Power Pressure- And Temperature-Programmable Micro Μgc Column

Abstract

This paper presents the theory, fabrication and experimental results for the highest performance, low-power micro gas chromatography ( GC) column realized to date. The suspendeddielectric 1m-long column is split into two sections, permitting pressure programming. Furthermore, each section is individually temperature programmable. The integrated heaters have a mean resistance of 6.8 k and a TCR of 1439 ppm/ºC. A single heater in the fully suspended column requires 6 mW to raise the local column temperature by 100 ºC in vacuum (10 µTorr). The column has separated 10 alkanes in 52 s and four chemical warfare agent simulants and an explosive simulant in 60s.

Uncooled infrared thermal imaging sensor using vacuum-evaporated europium phosphor

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A versatile surface channel concept for microfluidic applications

“…Microchannels have to be mechanically strong for highpressure applications, with proper fluidic interfacing to the macro-world, possibly with zero dead-volume, while the interfacing to the microchannel and the microchannel itself should be chemically inert for various chemical applications [7].…”