A Low-Temperature Alumina/Copper Diffusion Bonding Process using La-Doped Titanium Interlayers

Abstract

Ceramic-to-metal heterojunctions have been established to improve high-temperature stability for applications in aerospace and harsh environments. In this work, we employed low-temperature diffusion bonding to realize an alumina/Cu heterogeneous joint. Using a thin layer of lanthanum-doped titanium (La-doped Ti) to metallize the alumina surface, we achieved the bonding at a temperature range of 250–350 °C. We produced a uniform, thermally stable, and high-strength alumina/Cu joint after a hot-press process in vacuum. Signals from X-ray diffraction (XRD) suggested the successful diffusion of Ti and La into the alumina substrate, as Ti can easily substitute Al in alumina, and La has a better oxygen affinity than that of Al. The transmission electron microscopy and XRD results also showed the existence of CuxTiyO phases without CuxTiy or LaOx. In addition, the bonding strength of alumina/copper hot-pressed at 250, 300, and 350 °C were 7.5, 9.8 and 15.0 MPa, respectively. The process developed in this study successfully lowered the bonding temperature for the alumina/copper joint.

Surface resistivity and bonding strength of atmosphere plasma sprayed copper‐coated alumina substrate

“…4 Currently used methods of metallic coatings on ceramics include Mo-Mn method, 5,6 activity metal blazing (AMB), 7,8 direct bonded copper (DBC), 9,10 and direct plating copper (DPC). 11,12 The advantage feature of these methods is that an adhesive interlayer can be produced between alumina substrate and metal films. Unfortunately, with drawbacks such as residual stress resulting from high-temperature process, costly equipment, and sophisticated handle procedure, products manufactured by these methods are not suitable for the high integrated circuit.…”

“…Currently used methods of metallic coatings on ceramics include Mo‐Mn method, 5,6 activity metal blazing (AMB), 7,8 direct bonded copper (DBC), 9,10 and direct plating copper (DPC) 11,12 . The advantage feature of these methods is that an adhesive interlayer can be produced between alumina substrate and metal films.…”