A low voltage silicon micro-pump based on piezoelectric thin films

Cazorla, P.-H.; Fuchs, Olivier; Cochet, M.; Maubert, Sandrine; Rhun, G. Le; Fouillet, Yves; Defaÿ, E.

doi:10.1016/j.sna.2016.09.012

Cited by 71 publications

(32 citation statements)

References 9 publications

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“…It is composed of the piezoelectric ceramic, PET ( Polyethylene terephthalate ) pump body, and an elastomer check valve. The PZT liquid pump has many advantages such as small size, low noise and power consumption, simple structure, easily being controlled, no electromagnetic interference and mechanical wear, and no maintenance [6]- [10]. It is a new type of product with energy saving and low carbon for the environmental protection.…”

Section: Introductionmentioning

confidence: 99%

A Power Supply Consists of the DC-DC Boost Converter and a Full-Bridge Inverter Circuits for a PZT Liquid Pump

Liu¹,

Chang²,

Chen³

et al. 2019

IJIEE

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Section: Introductionmentioning

confidence: 99%

A Power Supply Consists of the DC-DC Boost Converter and a Full-Bridge Inverter Circuits for a PZT Liquid Pump

Liu¹,

Chang²,

Chen³

et al. 2019

IJIEE

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“…In recent years, a variety of piezoelectric motors or pumps were presented [16]- [19]. Cazorla et al [20] developed a functional micro-pump made of silicon and PZT thin films, and obtained the water flow rate of 3.5 μL/min at 1 Hz, 24 V actuation voltage. Wang et al [21] presents a piezoelectric micropump with high flow rate, high pumping pressure, and lower power consumption, which is favorable for the fuel delivery system.…”

Section: Introductionmentioning

confidence: 99%

A PZT Liquid Pump Made of the Piezoelectric Ceramic with Low Power and High Flow Rate

Chang¹,

Liu²,

Wang³

et al. 2019

IJIEE

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Piezoelectric pumps possess many advantages such as quiet operation, quick response, simple structure, and nonelectromagnetic radiation. This paper presents a PZT (Lead zirconate titanate) liquid pump with low power, high flow rate, small size, and light weight. The liquid pump is composed of the piezoelectric ceramic, elastomer valve, and PET (Polyethylene terephthalate) pump body. The power consumption, flow rate, body size and weight of the pump are 1 W, 800 ± 5% ml min-1 , 50 × 50 × 10 mm., and 50 g, respectively. Additionly, the pump works at an exciting voltage of 50 Hz, 40 V. According to the applied voltage or frequency to a PZT pump, the flow rate of the fluid is able to be controled. Besides, the liquid pump is suitable for various fluids such as water, alcohol, soda, hydrochloric acid, etc.

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“…Piezoelectric (PZT) pumps, self‐priming diaphragm micropumps that are compact, lightweight, easy to use, and allow low‐cost fluid delivery, are now the dominant pump in drug delivery systems and other biomedical applications . Although PZT micropumps can pump both liquid and gas , they are normally used to transport liquids through a pump chamber. However, in this study, we utilized a PZT diaphragm micropump to evacuate air from the sealed outlet reservoir of a PDMS microfluidic chip, thus reducing the pressure within.…”

Section: Introductionmentioning

confidence: 99%

A compact and facile microfluidic droplet creation device using a piezoelectric diaphragm micropump for droplet digital PCR platforms

et al. 2017

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We have exploited a compact and facile microfluidic droplet creation device consisting of a poly(dimethylsiloxane) microfluidic chip possessing T-junction channel geometry, two inlet reservoirs, and one outlet reservoir, and a piezoelectric (PZT) diaphragm micropump with controller. Air was evacuated from the outlet reservoir using the PZT pump, reducing the pressure inside. The reduced pressure within the outlet reservoir pulled oil and aqueous solution preloaded in the inlet reservoirs into the microchannels, which then merged at the T-junction, successfully forming water-in-oil emulsion droplets at a rate of ∼1000 per second with minimal sample loss. We confirmed that the onset of droplet formation occurred immediately after turning on the pump (<1 s). Over repeated runs, droplet formation was highly reproducible, with droplet size purity (polydispersity, <4%) comparable to that achieved using other microfluidic droplet preparation techniques. We also demonstrated single-molecule PCR amplification in the created droplets, suggesting that the device could be used for effective droplet digital PCR platforms in most laboratories without requiring great expense, space, or time for acquiring technical skills.

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A low voltage silicon micro-pump based on piezoelectric thin films

Cited by 71 publications

References 9 publications

A Power Supply Consists of the DC-DC Boost Converter and a Full-Bridge Inverter Circuits for a PZT Liquid Pump

A Power Supply Consists of the DC-DC Boost Converter and a Full-Bridge Inverter Circuits for a PZT Liquid Pump

A PZT Liquid Pump Made of the Piezoelectric Ceramic with Low Power and High Flow Rate

A compact and facile microfluidic droplet creation device using a piezoelectric diaphragm micropump for droplet digital PCR platforms

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