2020 32nd International Conference on Microelectronics (ICM) 2020
DOI: 10.1109/icm50269.2020.9331778
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A Lumped Element Model for the Damping Mechanism of Micro-oscillators in the Transitional Flow Regime

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“…All proportionalities found within this study between the electric components and the physical properties of the type of gas (molecular mass M mol , viscosity η, density ρ, heat conductivity λ, and heat capacity C p ) as well as on the resonance frequency f r (respectively higher bending mode) of the micro-oscillators are summarized in table 1. Additionally, the insights of a previous study on the transitional flow regime with focus on the parameter A vis is included [32].…”
Section: Viscous Resistancementioning
confidence: 99%
“…All proportionalities found within this study between the electric components and the physical properties of the type of gas (molecular mass M mol , viscosity η, density ρ, heat conductivity λ, and heat capacity C p ) as well as on the resonance frequency f r (respectively higher bending mode) of the micro-oscillators are summarized in table 1. Additionally, the insights of a previous study on the transitional flow regime with focus on the parameter A vis is included [32].…”
Section: Viscous Resistancementioning
confidence: 99%