-This paper studies the steady-state analysis of a system of ODE-AE-CGE arising from simulation of MOS RF autonomous circuits in which the transistor plays as current generator and its current equations could adequately represent the transistor large-signal dynamic behavior. Gauss-Seidel relaxation is applied to decouple the system so that shooting method, which is used to find the periodic steady-state response, can be performed with low-order sensitivity matrix. This simplifies the solution process and results in a fast algorithm. We illustrate the new algorithm with the simulation of a typically voltage-controlled oscillator (VCO), the simulation results show good agreement with those obtained by MEDICI, a device simulator.