A macromodel for squeeze-film air damping in the free-molecule regime

Hu, Gang; Ye, Wenjing

doi:10.1063/1.3275844

Cited by 12 publications

(9 citation statements)

References 32 publications

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“…When it is 1, the collision is diffusive. Reported values for TAC are dependent of the measurement method and surface chemistry, but are generally less than unity [20,28,29]. Due to the difference between these measurements, the effect of TAC will be discussed.…”

Section: The Residual Gas Damping In An Infinite Gas Volumementioning

confidence: 99%

“…Christian and Cavalleri analyzed the residual gas damping in an infinite volume by considering the statistics of momentum exchange during collisions [11,14]. The latter is squeeze-film damping, which has also been observed and studied for MEMS oscillators [14][15][16][17][18][19][20][21]. Two models were used to analyze this damping in rarefied gas: the energy transfer model (ETM) and the model using the differential equation of the change in density of the gas.…”

Section: Introductionmentioning

confidence: 99%

“…The first model was proposed by Bao et al and suggested that the collisions between molecules and structures are elastic, so the energy transfer between them can be easily calculated and a rigorous formula of force noise can be derived [17]. On the basis of these, a molecular dynamics (MD) simulation code and a generalized ETM were developed [18,20,21]. The other model was proposed by Suijlen et al and the noise force can be derived from the differential equation due to the change in density of the gas in the gap volume [19].…”

Section: Introductionmentioning

confidence: 99%

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Influence of the residual gas damping noise in the test of the gravitational inverse-square law

Luo

Tan

et al. 2020

Class. Quantum Grav.

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Many theories, such as the unification theories that would include gravitation, predict deviations from Newtonian inverse-square law (ISL) at short range. Many high precision experiments have been performed, but additional experiments are still of high scientific importance. Here, we discuss the torque thermal noise caused by residual gas damping, especially the effect of squeeze-film damping, in a proposed ISL experiment at the range of tens of microns. In such experiments, torsion pendulums are usually used to probe the torque interactions between the detector and the attractor, of which the thermal noise should be considered carefully due to the high sensitivity. By introducing a thermal accommodation coefficient, we can accurately model the torque noise of the residual gas damping as a combination of elastic and inelastic collisions. The results show that the noise will increase significantly at short separations between the pendulum and the surrounding components. In particular, when the separation is smaller than 40 μm, the squeeze-film damping may be larger than the internal damping of the pendulum used in present experiments, and become the fundamental limit for the experiments in the shorter range.

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Section: The Residual Gas Damping In An Infinite Gas Volumementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Influence of the residual gas damping noise in the test of the gravitational inverse-square law

Luo

Tan

et al. 2020

Class. Quantum Grav.

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“…A numerical simulation method known as the Monte Carlo method is used to obtain the damping. The method used is the one developed by Hong and Ye [ 14 ]. It is valid in the free molecular regime and is more computationally efficient compared to Molecular Dynamic simulations.…”

Section: Design and Modellingmentioning

confidence: 99%

Characterization of a Laterally Oscillating Microresonator Operating in the Nonlinear Region

Ramanan

Teoh

et al. 2016

Micromachines

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Microresonators are popular structures used in a variety of applications. They generally operate in the linear region where the vibration amplitude is limited, thereby limiting the signal-to-noise ratio. The nonlinear vibration region, where amplitudes and, consequently, the signal-to-noise ratio are relatively large, is generally avoided owing to instabilities and complexities in analysing the vibrations. In this work, a nonlinear dynamic model with a damping constant obtained from Monte Carlo simulation was derived to describe the vibration responses of microresonators operating in the nonlinear region. A laterally oscillating comb-drive driven resonator was designed, fabricated and characterized at various pressures and driving signals to validate the model. A simple method to extract the quality factor of the resonator in the nonlinear region was also proposed. The measured quality factors were compared with those obtained from the nonlinear model and a good agreement was obtained.

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“…Viscous energy dissipation in the fluid between the two plates becomes a representative damping mechanism in laterally driven microdevices. 5,9 Over the past two decades, the squeeze film damping in MEMS devices has been studied extensively, 1–4,6–24 while less attention on slide film damping. 5,9,25–31 In 2007, Baoa and Yang 17 and Pratap et al 18 have presented a much comprehensive overview about squeeze film air damping in MEMS devices.…”

Section: Introductionmentioning

confidence: 99%

Slide film damping in microelectromechanical system devices

Wei-dong

Jia

2013

Proceedings of the Institution of Mechanical Engineers, Part N:

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Film damping caused by microfluids has important effects on the dynamic characteristics of moving elements of microelectromechanical system devices. There are two kinds of film damping existing in microelectromechanical system devices, for instance, slide film damping and squeeze film damping. This article presents an overview on the recent research progress on the slide film damping in microelectromechanical system devices. Based on the first slip velocity boundary conditions, this article discusses two kinds of damping models in detail, which commonly used to investigate on the slide film damping. For the convenience of quick reference in future, laterally moving microstructures, adequate important equations and applicable conditions are included in this article. Finally, we proposed two unified models for the analysis and design of laterally moving microstructured devices.

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A macromodel for squeeze-film air damping in the free-molecule regime

Cited by 12 publications

References 32 publications

Influence of the residual gas damping noise in the test of the gravitational inverse-square law

Influence of the residual gas damping noise in the test of the gravitational inverse-square law

Characterization of a Laterally Oscillating Microresonator Operating in the Nonlinear Region

Slide film damping in microelectromechanical system devices

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