A magnetically levitated anti-vibration mount

Jones, D.; Owen, R.G.

doi:10.1109/tmag.1984.1063309

Cited by 6 publications

(2 citation statements)

References 1 publication

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“…Electromagnetic control may be an option, by applying electromagnetic levitation [5,6]. However, electromagnetic force rapidly decreases for wider gaps, and the volume of the electromagnet rapidly becomes larger for that needed to supply stronger force.…”

Section: Introductionmentioning

confidence: 99%

A Hybrid Structure of Dual Stators and a Pneumatic Spring for Resonance Control in an Air Mount

Kim¹,

Kim²,

Kang³

et al. 2013

JEMAA

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An active device using electromagnetic forces was constructed and examined for the purpose of minimizing the resonance in air mounts of clean rooms. The air mounts are vulnerable to low-frequency resonance due to heavy weight and low stiffness. A hybrid structure of the active device, composed of pneumatic and electromagnetic parts, was developed and tested. The pneumatic parts in the device support heavy weights under the air mounts, and the electromagnetic parts reduce the resonance. The electromagnetic parts are composed of dual stators and an armature, which surround the pneumatic parts. The resonance can decrease when electromagnetic forces are generated in the gaps between the stators and the armature. Four active devices were installed under a 3-ton surface plate for a vibration test apparatus. The vibration was detected by eddy-current sensors. Discrete P Control logic was based on displacement, and embedded in a C6713 DSP. The results from impact tests show that the peak magnitude in the resonance frequency can be reduced to ?10 dB.

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Section: Introductionmentioning

confidence: 99%

A Hybrid Structure of Dual Stators and a Pneumatic Spring for Resonance Control in an Air Mount

Kim¹,

Kim²,

Kang³

et al. 2013

JEMAA

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show abstract

“…Although EM may be applied as a means for controlling vibrations [13][14][15][16], the load capacity is not enough to sustain tons of mass; thus, it cannot be used in the manufacturing system. Microvibration can be managed by combining EM and pneumatic forces.…”

Section: Introductionmentioning

confidence: 99%

A 3 DOF Model for an Electromagnetic Air Mount

Kim

Kang

et al. 2012

Advances in Acoustics and Vibration

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A 4 × 4 matrix model with three degrees of freedom is proposed as a means for controlling microvibrations and applied to an electromagnetic isolator. The model was derived from an assumption based on small-and low-frequency vibrations. The coordinates of the 3 DOF was composed of the 4 variables, representing a vertical position, pitch, roll, and a proof term. The coordinates were calculated from the 4 position sensors in the isolator and formulated into a 4 × 4 matrix, which possesses inversive full rank. The electro-magnetic isolator was built for a simulated machine in semiconductor manufacturing and consisted of a heavy surface plate, sensors, amps, a controller, and air springs with electromagnets. The electromagnets are installed in a pneumatic chamber of the individual air spring. The performance of the 3 DOF model was experimented and compared with that of a 1 DOF model in an impact test. The settling time in the result was reduced to 25%.

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An electro-magneto-pneumatic spring for vibration control in semiconductor manufacturing

Kim

Lee

Kim

et al. 2009

2009 IEEE International Conference on Mechatronics

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An active vibration isolator was developed for semiconductor manufacturing machines using electro-magnetic(EM) levitation force. The spring is composed of a pneumatic elastic chamber and a magnetic actuator. The actuator has a coil and a permanent magnetic plate and is installed inside of the chamber. The mechanical and electronic parts are designed to operate under a weight of 2.0 tons. An air mount is constructed for the experiment with a stone surface plate, 4 active air springs, 4 gap sensors, a DSP controller, a linear power amp and vibration measurement systems. The impulse response of the air mount was monitored before and after the active control. The time duration was reduced by 77% in the impulse response. The maximum peak in frequency domain was reduced by 62%. We also found that the active system can avoid the resonance caused by the natural frequency of the passive system.

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A magnetically levitated anti-vibration mount

Cited by 6 publications

References 1 publication

A Hybrid Structure of Dual Stators and a Pneumatic Spring for Resonance Control in an Air Mount

A Hybrid Structure of Dual Stators and a Pneumatic Spring for Resonance Control in an Air Mount

A 3 DOF Model for an Electromagnetic Air Mount

An electro-magneto-pneumatic spring for vibration control in semiconductor manufacturing

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