A maskless laser-write lithography processing of thin-film transistors on a hemispherical surface

Yoo, Geonwook; Lee, Ho-Jin; Radtke, Daniela; Stumpf, Marko; Zeitner, Uwe D.; Kanicki, Jerzy

doi:10.1016/j.mee.2009.05.032

Cited by 19 publications

(8 citation statements)

References 15 publications

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“…Various approaches have been demonstrated to create patterns on curved or nonplanar surfaces. Direct methods use electron beam, ion beam, or laser to create pattern on photoresists or substrates directly [ 65 , 66 , 67 , 68 , 69 , 70 , 71 , 72 , 73 ]. These approaches do not require a mask to generate necessary patterns, and thus features can usually be transferred without difficulties.…”

Section: Mould or Master Manufacturementioning

confidence: 99%

Fabrication Methods for Microfluidic Devices: An Overview

2021

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Microfluidic devices offer the potential to automate a wide variety of chemical and biological operations that are applicable for diagnostic and therapeutic operations with higher efficiency as well as higher repeatability and reproducibility. Polymer based microfluidic devices offer particular advantages including those of cost and biocompatibility. Here, we describe direct and replication approaches for manufacturing of polymer microfluidic devices. Replications approaches require fabrication of mould or master and we describe different methods of mould manufacture, including mechanical (micro-cutting; ultrasonic machining), energy-assisted methods (electrodischarge machining, micro-electrochemical machining, laser ablation, electron beam machining, focused ion beam (FIB) machining), traditional micro-electromechanical systems (MEMS) processes, as well as mould fabrication approaches for curved surfaces. The approaches for microfluidic device fabrications are described in terms of low volume production (casting, lamination, laser ablation, 3D printing) and high-volume production (hot embossing, injection moulding, and film or sheet operations).

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Section: Mould or Master Manufacturementioning

confidence: 99%

Fabrication Methods for Microfluidic Devices: An Overview

2021

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“…We previously developed a customized concave glass substrate for the a-Si TFT PPS array fabricated on a hemispherical surface, that we used in this work for hemispherical PDMS stamps development. [8,15] To realize the OPD array on a hemispherical surface, we suggest a novel process combining the modified transfer stamping process and a stereolithography technique to fabricate a 3D mask for metal electrodes deposition over hemispherical surface.…”

Section: D Printed Masks and Transfer Stamping Process To Enable The Fabrication Of The Hemispherical Organic Photodiodesmentioning

confidence: 99%

“…The glass substrate is fully customized www.advmattechnol.de by a manufacturer to have FOV = 120°. [8,15] The prototype 3D shadow mask were modelled by SolidWorks 2016 (Dassault System, USA) CAD software to have total five uniformly distributed arrays (aperture = 1 mm, pitch = 1 mm) to fabricate 5 × 5 array. The Solidworks file (.SLDPRT) was converted to .STL format to be compatible with 3D printer's software package.…”

Section: D Printed Masks and Transfer Stamping Process To Enable The Fabrication Of The Hemispherical Organic Photodiodesmentioning

confidence: 99%

3D Printed Masks and Transfer Stamping Process to Enable the Fabrication of the Hemispherical Organic Photodiodes

Kim

Moon

Kanicki

2017

Adv Materials Technologies

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Organic PhotodiodesToday, most of the current image sensors and cameras are based on flat focal plane array (FPA) technology, including charge coupled devices (CCDs), complementary metal oxide semiconductor (CMOS) imager, or thin film transistors (TFTs) arrays on glass substrates. [1][2][3] The planar FPA requires complex multielement lenses to correct the image surface; i.e., the Petzval surface. [4] The nonidealities of the optical system can lead to a distorted and blurred image due to off-axis aberrations. To correct these problems, additional optical elements and high precision lens system are required, which result in complex and expensive optical system. Compared to the camera system with the flat FPA, a curved image surface mimicking a spherical human retina provides numerous advantages. [5] The image system with the curved image surface can provide a wide field of view (FOV), a low optical aberration, low 1/f number and less optical lens components leading to compact, cheaper, and lighter camera system. [4,6,7] Over the years, the fabrication of image sensors on curved surface has long been a challenging task among researchers due to the difficulty of developing fabrication methods suitable for curved surfaces. To name a few, Ko et al. developed a

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“…Most of these researches have employed either laser lithography or a modified lithography process. The laser lithography technique has been used to directly fabricate accurate 3-D microstructures on curved substrates without a photomask [1][2][3]. However, this technique has two major disadvantages: it requires expensive laser lithography equipment and it has a low throughput.…”

Section: Introductionmentioning

confidence: 99%