A MEMS-Based Fast-Response Miniature Five-Hole Probe With Optical Pressure Transducers

Zhou, Haocheng; Sheplak, Mark

doi:10.1109/jmems.2020.3009927

Cited by 3 publications

(2 citation statements)

References 14 publications

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“…Zhou Haocheng et al proposed a miniature five-hole probe based on a fiber-optic lever. The resulting five-hole probe has a fast response with a modeled settling time of 0.24 ms and a measured high-frequency range of about 3.5 kHz [17]. Currently, most studies on fiber-optic FP pressure sensors focus on single-point tests.…”

Section: Introductionmentioning

confidence: 99%

A Five-Hole Pressure Probe Based on Integrated MEMS Fiber-Optic Fabry-Perot Sensors

Song,

Ma,

Zhao

et al. 2024

Micromachines

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The five-hole pressure probe based on Micro-Electro-Mechanical Systems (MEMS) technology is designed to meet the needs of engine inlet pressure measurement. The probe, including a pressure-sensitive detection unit and a five-hole probe encapsulation structure, combines the advantages of a five-hole probe with fiber optic sensing. The pressure-sensitive detection unit utilizes silicon-glass anodic bonding to achieve the integrated and batch-producible manufacturing of five pressure-sensitive Fabry–Perot (FP) cavities. The probe structure and parameters of the sensitive unit were optimized based on fluid and mechanical simulations. The non-scanning correlation demodulation technology was applied to extract specific cavity lengths from multiple interference surfaces. The sealing platform was established to analyze the sealing performance of the five-hole probe and the pressure-sensitive detection unit. The testing platform was established to test the pressure response characteristics of the probe. Experimental results indicate that the probe has good sealing performance between different air passages, making it suitable for detecting pressure from multiple directions. The pressure responses are linear within the range of 0–250 kPa, with the average pressure sensitivity of the five sensors ranging from 11.061 to 11.546 nm/kPa. The maximum non-linear error is ≤1.083%.

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Section: Introductionmentioning

confidence: 99%

A Five-Hole Pressure Probe Based on Integrated MEMS Fiber-Optic Fabry-Perot Sensors

Song,

Ma,

Zhao

et al. 2024

Micromachines

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“…Examples include fiber-optic anemometers based on dual-channel Fabry-Perot (FP) interferometers (Wang et al, 2019), as well as a single-channel differential-pressure FP sensor and a diaphragm-based sensor with built-in fiber Bragg Grating (FBGs), both coupled for use with Pitot tubes (Liu et al, 2020b;Fujiwara et al, 2020). There are also precedents expecting to combine fiber-optic pressure sensors with MHPs for future wind tunnel applications, such as multiple MEMS optical transducers (Zhou and Sheplak, 2020) and differentially dynamic FP pressure sensors (Heckmeier et al, 2019). And the development of new MHPs based on fiber-optic sensing technology for more reliable measurement of flow field vectors remains a continuous research topic.…”

Section: Introductionmentioning

confidence: 99%

Fiber-optic integrated aerodynamic three-hole vector probe for high-velocity flow field measurement

et al. 2022

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Theoretical analysis and comparative study of assorted diaphragm primarily based Micro Electro Mechanical System (MEMS) optical pressure sensors

Sripriya,

Juliette

2024

Expert Systems with Applications

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A MEMS-Based Fast-Response Miniature Five-Hole Probe With Optical Pressure Transducers

Cited by 3 publications

References 14 publications

A Five-Hole Pressure Probe Based on Integrated MEMS Fiber-Optic Fabry-Perot Sensors

A Five-Hole Pressure Probe Based on Integrated MEMS Fiber-Optic Fabry-Perot Sensors

Fiber-optic integrated aerodynamic three-hole vector probe for high-velocity flow field measurement

Theoretical analysis and comparative study of assorted diaphragm primarily based Micro Electro Mechanical System (MEMS) optical pressure sensors

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