A MEMS<i>XY</i>-stage integrating compliant mechanism for nanopositioning at sub-nanometer resolution

Xi, Xiang; Clancy, Tyler; Wu, Xuezhong; Sun, Yu; Liu, Xinyu

doi:10.1088/0960-1317/26/2/025014

Cited by 26 publications

(8 citation statements)

References 41 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The one DOF architecture permitted a high-accuracy translation, but it was limited in its practical applications [ 8 ]. Then, two DOF architecture was proposed [ 9 , 10 ]. Nevertheless, the one DOF and two DOF architectures have limited applications.…”

Section: Introductionmentioning

confidence: 99%

Design and Optimization for a New XYZ Micropositioner with Embedded Displacement Sensor for Biomaterial Sample Probing Application

Dang

Phan

et al. 2022

Sensors

View full text Add to dashboard Cite

An XYZ compliant micropositioner has been widely mentioned in precision engineering, but the displacements in the X, Y, and Z directions are often not the same. In this study, a design and optimization for a new XYZ micropositioner are developed to obtain three same displacements in three axes. The proposed micropositioner is a planar mechanism whose advantage is a generation of three motions with only two actuators. In the design strategy, the proposed micropositioner is designed by a combination of a symmetrical four-lever displacement amplifier, a symmetrical parallel guiding mechanism, and a symmetrical parallel redirection mechanism. The Z-shaped hinges are used to gain motion in the Z-axis displacement. Four flexure right-circular hinges are combined with two rigid joints and two flexure leaf hinges to permit two large X-and-Y displacements. The symmetrical four-lever displacement amplifier is designed to increase the micropositioner’s travel. The displacement sensor is built by embedding the strain gauges on the hinges of the micropositioner, which is developed to measure the travel of the micropositioner. The behaviors and performances of the micropositioner are modeled by using the Taguchi-based response surface methodology. Additionally, the geometrical factors of the XYZ micropositioner are optimized by teaching–learning-based optimization. The optimized design parameters are defined with an A of 0.9 mm, a B of 0.8 mm, a C of 0.57 mm, and a D of 0.7 mm. The safety factor gains 1.85, while the displacement achieves 515.7278 µm. The developed micropositioner is a potential option for biomedical sample testing in a nanoindentation system.

show abstract

Section: Introductionmentioning

confidence: 99%

Design and Optimization for a New XYZ Micropositioner with Embedded Displacement Sensor for Biomaterial Sample Probing Application

Dang

Phan

et al. 2022

Sensors

View full text Add to dashboard Cite

show abstract

“…The compliant positioning platform driven by a piezoelectric actuator (PZA) is widely used in aerospace technology, Microelectronics Mechanical Systems (MEMS), biomedical engineering, optical engineering, and other modern precision engineering fields [ 1 , 2 ], taking advantage of the advantages of a PZA, such as the ultra-high displacement resolution, high-frequency response, and large output force [ 3 , 4 ], as well as the characteristics of a flexible hinge, such as high precision, fast response, and compact structure [ 5 , 6 ].…”

Section: Introductionmentioning

confidence: 99%

“…However, since the stroke of the PZA is small, it is only 0.1% of its length [ 2 ], generally several tens of microns. An amplifier is generally required to amplify the PAZ’s stroke to obtain the positioning platform driven by the PZA.…”

Section: Introductionmentioning

confidence: 99%

Dynamic Analysis and Experiment of 6-DOF Compliant Platform Based on Bridge-Type Amplifier

2020

View full text Add to dashboard Cite

In this paper, we establish a dynamic model of a six-degrees-of-freedom (6-DOF) compliant positioning platform based on bridge-type amplifiers. Based on the elastic beam theory and energy relationship, we derived the bridge-type amplifier’s dynamic model using the Lagrange equation. Then, we established a dynamic model of the compliant platform based on the equivalent mass and equivalent stiffness of the bridge-type amplifier, and the analysis formula of the natural frequency was derived. Finally, the analytical models of natural frequencies of the bridge-type amplifier and the compliant platforms were verified using the finite element analysis (FEA) method. Through modal experiments, the damping ratio and natural frequency were identified. Step response experiments in the X/Y direction and Z direction were performed. The phenomenon that the experimental results appeared to match the theoretical calculations indicates that the dynamic model was accurate.

show abstract

“…With the rapid developments in the microelectromechanical system (MEMS) 1,2 and nanotechnology, micro-/nanopositioning system is becoming more and more important 3 and has been extensively applied in the fields of ultra-precision machining, 4–6 optical engineering, 7 biomedical engineering, 8–10 and lithography machines. The multi-degrees-of-freedom (multi-DOFs) precision positioning stage is a key part in the micro-/nanopositioning system.…”

Section: Introductionmentioning

confidence: 99%

Characteristic analysis of a micro-/nanopositioning stage with coupling errors by the gravity

Lin

Shen

et al. 2019

Proceedings of the Institution of Mechanical Engineers, Part C:

View full text Add to dashboard Cite

The piezo-actuated micro-/nanopositioning stages are often used in the current precision engineering applications, and the coupling deformation under the gravity of the stage is critical to error analysis. Considering the torsional deformation and bending deformation of the flexure hinges, the coupling error’s analytical model of the positioning stage along the Z-axis is derived by using the virtual work principle and the elastic beam theory. The performance of the proposed theoretical model is analyzed and verified by the comparison between two common materials, and the quantities of the piezoelectric actuators are also analyzed with the impact on the coupling deformation of the stage along the Z-axis. Through the comparison and analysis of theoretical results, simulation results and experimental results, the maximum error between finite element analysis and experimental results is 11.43%, with the rest fluctuates within 10%, which proves the correctness of the theoretical model. It is concluded that gravity generated by the workload and the stage does have an influence on the coupling deformation along the Z-axis of the micro-/nanopositioning stage. It cannot be ignored in the analysis and consideration of the positioning stage.

show abstract

A MEMSXY-stage integrating compliant mechanism for nanopositioning at sub-nanometer resolution

Cited by 26 publications

References 41 publications

Design and Optimization for a New XYZ Micropositioner with Embedded Displacement Sensor for Biomaterial Sample Probing Application

Design and Optimization for a New XYZ Micropositioner with Embedded Displacement Sensor for Biomaterial Sample Probing Application

Dynamic Analysis and Experiment of 6-DOF Compliant Platform Based on Bridge-Type Amplifier

Characteristic analysis of a micro-/nanopositioning stage with coupling errors by the gravity

Contact Info

Product

Resources

About