A MEMS Microreed Switch With One Reed Embedded in the Silicon Substrate

Tang, Min; Lee, Yong Hean; Kumar, R.; Shankar, Ravi; Neel, O. Le; Noviello, Giuseppe

doi:10.1109/jmems.2011.2167668

Cited by 6 publications

(4 citation statements)

References 15 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…However, it deflects more in the middle on high stress gradient (figure 4(b)) and touches the substrate before making contact at the free edge, which makes it difficult to close using the force available from the SM. On the other hand, the design that we define as the 'crab-leg' flexure minimizes the extensional axial stress [22,23] and reduces the deflection sufficiently so that it can be actuated by the force applied through the SM.…”

Section: Magnetically-actuated Ni Patch Designmentioning

confidence: 99%

Magnetically-actuated micromechanical nickel patches for a monolithically integrated reconfigurable antenna on printed circuit board

Pal

Donzelli²,

Santhanam

et al. 2019

J. Micromech. Microeng.

View full text Add to dashboard Cite

In this paper, we present magnetically-actuated micromechanical Ni patches that have been monolithically integrated on a printed circuit board to demonstrate a reconfigurable pixelated antenna operating within the 5-8 GHz frequency bands. The proposed antenna is based on a monolithically integrated grid structure of movable nickel (Ni) and fixed copper (Cu) patches. The Ni patches are magnetically actuated by means of an array of switchable magnets (SMs) placed behind the ground plane of the antenna. This approach eliminates the need for bias lines, which are generally used in reconfigurable antennas and induce losses. Most importantly, the very low mechanical contact resistance (as low as 200 mΩ) between the Ni and Cu patch ensures the insertion of these devices on the antenna plane without introducing significant losses. The use of a SM for the actuation of the patch makes it such that the antenna can hold the desired configurations without consuming active power. Power is consumed only during the switching operation. To demonstrate the feasibility of the proposed idea, the four most relevant operating modes of this small antenna prototype, centered around 5.55 GHz, 6.44 GHz, and 7.89 GHz, are presented.

show abstract

Section: Magnetically-actuated Ni Patch Designmentioning

confidence: 99%

Magnetically-actuated micromechanical nickel patches for a monolithically integrated reconfigurable antenna on printed circuit board

Pal

Donzelli²,

Santhanam

et al. 2019

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

“…At present, many studies are focused on connecting beams, which can be roughly divided into four types, clamped-clamped * Author to whom any correspondence should be addressed. beam (also called fixed-fixed beam) [2,3], folded beam [4,5], serpentine beam [6][7][8][9][10][11] and crab-leg beam (also called L-shaped beam) [12][13][14][15][16][17]. These four types of spring beams have their own advantages and disadvantages in specific applications [18].…”

Section: Introductionmentioning

confidence: 99%

“…Mohammed et al presented a novel differential capacitive finger scheme, which fully eliminates the in-plane cross-axis sensitivity at the device level [13]. Crab-leg beam is also used in other types of sensors, such as microreed switch [14], piezoelectric accelerometers [15], vibration sensor [16], and gyroscope [17], to achieve high sensitivity.…”

Section: Introductionmentioning

confidence: 99%

Seven-shaped beam design for improving the sensitivity of two-dimensional MEMS sensors

Zhou,

Liu,

Cui

et al. 2023

J. Micromech. Microeng.

View full text Add to dashboard Cite

The spring constant of the connecting beam is one of the most crucial factors that affect the detection sensitivity of MEMS sensors. Existing researches reduce the spring constant by changing the parameters or number of connecting beams. In this paper, we propose a seven-shaped beam structure to modify the spring constant of MEMS sensors. The acute angle between the two segments of seven-shaped structure lowers spring constant. Compared with the crab-leg beam, it can bring a maximum sensitivity gain of 1.29 times through different angle designs. At the same time, compared with those combined beams, seven-shaped combined beams can bring a maximum sensitivity gain of 1.6 times. The two-dimensional MEMS sensor with seven-shaped beam has been designed and fabricated. According to the experimental results, the sensor reached a detection sensitivity of 25 fF/g. The relative error of the differential capacitance change between the measurement result and the simulation result is only 8.6%.

show abstract

“…Increasing the magnetic field during the off states causes the two metal reeds to come closer increasing the effective capacitance and thus provide a magnetically-tunable capacitor. Conventional realization of reeds switches since the 1950s 33 have been replaced with MEMS-based realization where smaller footprint and integration is desired 34 . However in this work, for proof of concept, a bulkier implementation was adequate since our feature sizes for the filters were sufficiently large.…”

mentioning

confidence: 99%

Design and implementation of magnetically–tunable quad–band filter utilizing split–ring resonators at microwave frequencies

Asci

Sadeqi

Wang

et al. 2020

Sci Rep

View full text Add to dashboard Cite

In this article, we present a magnetically-tunable quad-band filter with high tunability in the frequency range of 2.1-3.9 GHz. A multi-band filter with four stop-bands comprises of a microstrip line coupled to four frequency-selective split-ring resonators (SRRs). We achieve tuning of individual frequency bands using magnetic reed switches connected in between the capacitive gaps of each split-ring resonator. Application of magnetic field tunes this capacitance affecting its resonance frequency. The measured reflection spectrum of the proposed device matches well with the simulation results. The results show more than 25% tunability for each of the four bands with bandwidth values in the range of 30-70 MHz with over 100% overall tunability in the 2.1-3.9 GHz frequency spectrum. Metamaterials are artificially engineered structures that can be designed for achieving tailored electromagnetic properties that do not occur naturally 1. In this respect, there has been a growing interest on the design of different metamaterials over the past couple decades. Key applications of metamaterials include the design of an effective medium with a negative magnetic permeability, perfect lens, perfect absorbers or imagers 2-5. The ability to manipulate and control permeability and permittivity in metamaterials has been used to realize innovative microwave and millimeter-wave circuits and sensing platforms 6-16. Hence, metamaterials can also be utilized in microwaves and antenna systems 17-22. Yet some other applications where tunable metamaterials have been realized and applied are in the area of optical or plasmonic metamaterials with applications in biosensing 23 and optics 24,25. In that sense, plasmonic metamaterials can be implemented in order to get negative refraction and negative refractive index 26,27. Metamaterials are built using individual resonators of which split-ring resonators (SRRs) are one of the most commonly used. Adjusting the dimensions such as the length and the gap of the SRR enables one to realize metamaterials with resonances from microwave to optical frequencies. Moreover, one can actively tune the resonance frequency by incorporating a tunable circuit element such as a transistor, diode or a varactor 5,28,29. Emerging new standards and demand for wireless communications have necessitated transceivers that can work across multiple frequency bands. A key element in such transceivers is compact multi-band filters with an ability to support multiple standards 30. Circuit elements such as diodes, varactors, MEMS switches have been demonstrated for frequency tuning of filters; however, such filters support only a few bands with limited tuning range or exhibit high insertion loss 31,32. CMOS-based active switches, diodes and varactors suffer from intermodulation and harmonics due to the undesirable nonlinear properties of such active devices at high power and high frequencies. Moreover, active switches have off-state leakage, and are sensitive to the process-voltage-temperature (PVT) variations resulting in u...

show abstract

A MEMS Microreed Switch With One Reed Embedded in the Silicon Substrate

Cited by 6 publications

References 15 publications

Magnetically-actuated micromechanical nickel patches for a monolithically integrated reconfigurable antenna on printed circuit board

Magnetically-actuated micromechanical nickel patches for a monolithically integrated reconfigurable antenna on printed circuit board

Seven-shaped beam design for improving the sensitivity of two-dimensional MEMS sensors

Design and implementation of magnetically–tunable quad–band filter utilizing split–ring resonators at microwave frequencies

Contact Info

Product

Resources

About