A MEMS Voice Coil Motor with a 3D Solenoid Coil

Sun, Jiamian; Tao, Zhi; Li, Haiwang; Zhu, Kaiyun; Wang, Donghui; Wu, Hanxiao; Xu, Tiantong

doi:10.1109/nems51815.2021.9451430

Cited by 3 publications

(3 citation statements)

References 9 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…EMA is one of the optimal choices for achieving a large driving force with compact size [13]. However, the manufacture of electromagnetic actuators is complicated, and requires inductive coils to produce magnetic flux [14,15]. The majority of EMAs commonly utilize silicon as the substrate material.…”

Section: Introductionmentioning

confidence: 99%

Design and Implementation of a Flexible Electromagnetic Actuator for Tunable Terahertz Metamaterials

Zhou,

Liang,

Mei

et al. 2024

Micromachines

View full text Add to dashboard Cite

Actuators play a crucial role in microelectromechanical systems (MEMS) and hold substantial potential for applications in various domains, including reconfigurable metamaterials. This research aims to design, fabricate, and characterize structures for the actuation of the EMA. The electromagnetic actuator overcomes the lack of high drive voltage required by other actuators. The proposed actuator configuration comprises supporting cantilever beams with fixed ends, an integrated coil positioned above the cantilever’s movable plate, and a permanent magnet located beneath the cantilever’s movable plate to generate a static magnetic field. Utilizing flexible polyimide, the fabrication process of the EMA is simplified, overcoming limitations associated with silicon-based micromachining techniques. Furthermore, this approach potentially enables large-scale production of EMA, with displacement reaching up to 250 μm under a 100 mA current, thereby expanding their scope of applications in manufacturing. To demonstrate the function of the EMA, we integrated it with a metamaterial structure to form a compact, tunable terahertz absorber, demonstrating a potential for reconfigurable electromagnetic space.

show abstract

Section: Introductionmentioning

confidence: 99%

Design and Implementation of a Flexible Electromagnetic Actuator for Tunable Terahertz Metamaterials

Zhou,

Liang,

Mei

et al. 2024

Micromachines

View full text Add to dashboard Cite

show abstract

“…Over the last few decades, the field of micro metal coils has evolved rapidly due to the widespread application of micro metal coils in fields such as consumer electronics, the automobile industry, aerospace, machinery, the chemical industry, medicine, among others [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15]. Among the various types of micro metal coils, the coils based on MEMS technology and flexible electronic technology have greater research value [1][2][3][4][5][6][7][8].…”

Section: Introductionmentioning

confidence: 99%

“…The single-layer planar coil has no magnetic core-binding circuit, and the magnetic leakage is significant. Then, the single-layer thin film magnetic core or the two-layer thin film structure and sandwich structure are introduced to remarkably improve the inductance and quality factor of the planar spiral inductor [2][3][4][5][43][44][45][46]. The solenoid based on the MEMS process has good integration performance on standard silicon substrate, and the hollow solenoid coil can reduce the influence of substrate [47][48][49][50].…”

Section: Introductionmentioning

confidence: 99%

Recent Progress in the Preparation Technologies for Micro Metal Coils

et al. 2022

View full text Add to dashboard Cite

The recent development of micro-fabrication technologies has provided new methods for researchers to design and fabricate micro metal coils, which will allow the coils to be smaller, lighter, and have higher performance than traditional coils. As functional components of electromagnetic equipment, micro metal coils are widely used in micro-transformers, solenoid valves, relays, electromagnetic energy collection systems, and flexible wearable devices. Due to the high integration of components and the requirements of miniaturization, the preparation of micro metal coils has received increasing levels of attention. This paper discusses the typical structural types of micro metal coils, which are mainly divided into planar coils and three-dimensional coils, and the characteristics of the different structures of coils. The specific preparation materials are also summarized, which provides a reference for the preparation process of micro metal coils, including the macro-fabrication method, MEMS (Micro-Electro-Mechanical System) processing technology, the printing process, and other manufacturing technologies. Finally, perspectives on the remaining challenges and open opportunities are provided to help with future research, the development of the Internet of Things (IoTs), and engineering applications.

show abstract

Analysis Method Development of Hybrid Linear Motor Considering Cogging Force Effect

Jiang

Park

et al. 2023

Actuators

View full text Add to dashboard Cite

This study examines the distributions of the cogging and current forces in a hybrid linear motor and their impact on its performance. Subsequently, using the Maxwell stress tensor to analyze the force acting on the motor, a method has been proposed for calculating the cogging force effect on the mechanical system stiffness. Based on the force profile, it was found that the cogging force was a noncurrent force that could reduce the spring stiffness of a hybrid linear motor when it is in operation. An electromagnetic–mechanical coupling analysis was conducted to calculate the displacement and acceleration of the hybrid linear motor on a dummy jig. The experimental and analytical results were in good agreement, indicating that the proposed method is accurate and reliable.

show abstract

A MEMS Voice Coil Motor with a 3D Solenoid Coil

Cited by 3 publications

References 9 publications

Design and Implementation of a Flexible Electromagnetic Actuator for Tunable Terahertz Metamaterials

Design and Implementation of a Flexible Electromagnetic Actuator for Tunable Terahertz Metamaterials

Recent Progress in the Preparation Technologies for Micro Metal Coils

Analysis Method Development of Hybrid Linear Motor Considering Cogging Force Effect

Contact Info

Product

Resources

About