A metal-organic chemical vapor deposition approach to double-sided Tl2Ba2Ca1Cu2O8superconducting films on LaAlO3(100) substrates

Malandrino, Graziella; Borzì, Anna M.; Fragalá, Ignazio L.; Andreone, A.; Cassinese, A.; Pica, G.

doi:10.1039/b206039f

Cited by 15 publications

(13 citation statements)

References 28 publications

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“…The relevance of the approach relies upon the use of a titanium precursor with a low melting point, which dissolves the calcium and copper sources at » 80 C, thus affording a three-component molten source. Similar routes have been applied to the synthesis of high quality LaAlO 3 , [20] TlBaCaCuO, [21] and YBaCuO [22] films. Deposition parameters have therefore been optimized for the molten multimetal precursor mixture on the basis of its thermal properties.…”

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confidence: 93%

A Novel Approach to Synthesizing Calcium Copper Titanate Thin Films with Giant Dielectric Constants

et al. 2004

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ExperimentalMaterials Synthesis: The SBA-15 template was prepared by adding 4.0 g tri-block copolymer poly(ethylene glycol)-block-poly(propylene glycol)-block-poly(ethylene glycol) (EO 20 PO 70 EO 20 ) to a solution of 25 g (35 wt.-%) HCl and 125 g water under stirring. After stirring for 2 h, the copolymer was completely dissolved, after which 8.6 g TEOS was added. Following continuous stirring for 20 h at 35 C, the reaction mixture was transferred to a Teflon-lined autoclave and heated at 100 C for 24 h. The resulting product was obtained by filtration, washed repeatedly with a large amount of water, air-dried at room temperature, and calcined at 500 C for 6 h to remove the surfactant. The calcined SBA-15 was used as template for the preparation of mesoporous carbon CMK-3 by CVD as follows: 0.3 g of calcined SBA-15 was placed in an alumina boat and inserted into a flowthrough tube furnace. Under a flow of nitrogen saturated with styrene vapor at room temperature, the temperature of the furnace was increased, at a ramp rate of 20 C min ±1 , to the final pyrolysis/carbonization temperature (in the range 850±1050 C) and maintained for 3 h under the styrene-saturated nitrogen atmosphere. The furnace was then cooled to room temperature and the resulting SBA-15/carbon mesophase was thoroughly washed with hydrofluoric acid (HF) to etch out the silica. For comparison we also prepared a CMK-3 sample via liquid impregnation (designated CMK-3I) using the method of Jun et al. [4]. Sucrose was used as carbon source and carbonization was performed at 900 C for 7 h [4]. The mesoporous carbon was then recovered by etching the silica in HF. We also prepared CMK-3 samples using other carbon sources, e.g., acetonitrile.Characterization: Powder XRD analysis was performed using a Philips 1830 powder diffractometer with Cu Ka radiation (40 kV, 40 mA). Nitrogen sorption isotherms and textural properties of the materials were determined at ±196 C using nitrogen in a conventional volumetric technique by a Coulter SA3100 sorptometer. Before analysis, the samples were oven dried at 150 C and evacuated for 12 h at 200 C under vacuum. The surface area was calculated using the Brunauer±Emmett±Teller (BET) method based on adsorption data in the partial pressure (P/P 0 ) range 0.05±0.2, and the total pore volume was determined from the amount of the nitrogen adsorbed at P/P 0 » 0.99. The micropore surface area and micropore volume were obtained via t-plot analysis. SEM images were recorded using a JEOL JSM-820 scanning electron microscope. Samples were mounted using a double-sided conductive carbon sticky tape. A thin (ca. 10 nm) coating of gold sputter was deposited onto the samples to reduce the effects of charging. Thermogravimetric analysis of the silica/carbon (i.e., SBA-15/CMK-3) composite materials was performed using a Perkin Elmer Pyris 6 TG analyzer (heating rate of 20 C min ±1 ) in static-air conditions. The field of microelectronics has developed rapidly over the last fifteen years, and its evolution is documented by the contin...

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confidence: 93%

A Novel Approach to Synthesizing Calcium Copper Titanate Thin Films with Giant Dielectric Constants

et al. 2004

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“…The stoichiometry of the multicomponent mixture has been chosen considering results obtained in ex-situ processes to fabricate Ba/Ca/Cu matrices in a 2:1:2 ratio. [17] The three adducts are thermally stable and the TG curves indicate that these complexes sublime in a single step independently from the pressure used in the experiments. In Table 1, the temperature ranges of vaporization of the single precursors obtained under various pressures (namely 20 torr, 300 torr, and 760 torr), are reported and compared with data of the molten multicomponent precursor.…”

Section: Molten Precursor Mixturementioning

confidence: 98%

“…In this entire temperature range the multi-metal source is always molten, and this is due to the Ca(hfa) 2 tetraglyme precursor which acts, upon melting at about 95 C, as a solvent for the other companion sources (Ba and Cu), thus giving rise to a homogenous multimetal single source. [17] The mass loss depends linearly on vaporization time in the temperature range 100±120 C, and this indicates that no secondary phenomena, that could affect mass transport (such as decomposition or polymerization), occur in this range. At the highest temperature, a nonlinear behavior is observed, thereby suggesting that contributions of individual precursors prevail giving rise to differential vaporization rates.…”

Section: Molten Precursor Mixturementioning

confidence: 99%

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Fabrication of TlBa₂CaCu₂O₇c‐Axis Oriented Films Through a Hybrid In‐Situ MOCVD Process

Malandrino

Perdicaro

Condorelli

et al. 2005

Chemical Vapor Deposition

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The first procedure for a novel, hybrid, in-situ, MOCVD synthesis of superconducting TlBaCaCuO thin films on 10 mm 10 mm (100) LaAlO 3 substrates is reported. X-ray diffraction (XRD) studies, scanning electron microscopy (SEM) images, and energy dispersive X-ray (EDX) analyses have shown the selective growth of epitaxial TlBa 2 CaCu 2 O 7 (Tl-1212) films. The XRD patterns indicate that samples are highly c-axis oriented, and the (103) pole figure points to a good in-plane alignment. SEM images show highly homogeneous, smooth surfaces with a plate-like structure.

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“…[14] This adduct is a low-melting, highly volatile, thermally stable precursor and, even more interesting, it can act as a solvent for other species. This peculiarity has been also explored for other polyether adducts of hexafluoroacetylacetonate metals, such as Y(hfa) 3 d monoglyme, [15] and Ca(hfa) 2 d tetraglyme [16] (monoglyme = dimethoxyethane, tetraglyme = 2,5,8,11,14-pentaoxapentadecane).…”

Section: Introductionmentioning

confidence: 98%

MOCVD of LaAlO₃ Films from a Molten Precursor Mixture: Characterization of Liquid, Gas, and Deposited Phases

Malandrino¹,

Condorelli²,

Nigro³

2004

Chemical Vapor Deposition

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Dedicated to Prof. Ignazio L. Fragalà on the occasion of his 60th BirthdayThe capability of ªsecond-generationº precursors to act as a solvent of other precursor species, thus yielding a molten multicomponent source, has been investigated in detail. In particular, this novel approach has been applied to the MOCVD process of high quality, epitaxial LaAlO 3 thin films on SrTiO 3 (100) substrates. The adopted in-situ strategy involves a molten mixture consisting of the La(hfa) 3 d diglyme (Hhfa = 1,1,1,5,5,5-hexafluoro-2,4-pentanedione, diglyme = bis(2-methoxyethyl)-ether) precursor which acts as a solvent for the Al(acac) 3 (Hacac = acetylacetone). Thermal analyses and ªin situº Fourier transform infrared (FTIR) spectra of the gas phase proved that the molten multi-component source possesses suitable stability during vaporization and mass transport processes. The LaAlO 3 films have smooth surfaces and are epitaxially grown.

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A metal-organic chemical vapor deposition approach to double-sided Tl₂Ba₂Ca₁Cu₂O₈superconducting films on LaAlO₃(100) substrates

Cited by 15 publications

References 28 publications

A Novel Approach to Synthesizing Calcium Copper Titanate Thin Films with Giant Dielectric Constants

A Novel Approach to Synthesizing Calcium Copper Titanate Thin Films with Giant Dielectric Constants

Fabrication of TlBa₂CaCu₂O₇c‐Axis Oriented Films Through a Hybrid In‐Situ MOCVD Process

MOCVD of LaAlO₃ Films from a Molten Precursor Mixture: Characterization of Liquid, Gas, and Deposited Phases

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A metal-organic chemical vapor deposition approach to double-sided Tl2Ba2Ca1Cu2O8superconducting films on LaAlO3(100) substrates

Cited by 15 publications

References 28 publications

A Novel Approach to Synthesizing Calcium Copper Titanate Thin Films with Giant Dielectric Constants

A Novel Approach to Synthesizing Calcium Copper Titanate Thin Films with Giant Dielectric Constants

Fabrication of TlBa2CaCu2O7c‐Axis Oriented Films Through a Hybrid In‐Situ MOCVD Process

MOCVD of LaAlO3 Films from a Molten Precursor Mixture: Characterization of Liquid, Gas, and Deposited Phases

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A metal-organic chemical vapor deposition approach to double-sided Tl₂Ba₂Ca₁Cu₂O₈superconducting films on LaAlO₃(100) substrates

Fabrication of TlBa₂CaCu₂O₇c‐Axis Oriented Films Through a Hybrid In‐Situ MOCVD Process

MOCVD of LaAlO₃ Films from a Molten Precursor Mixture: Characterization of Liquid, Gas, and Deposited Phases