A method for achieving constant rotation rates in a microorthogonal linkage system

Romero, Louis A.; Dickey, Fred M.; Holswade, Scott C.

doi:10.1109/84.846704

Cited by 10 publications

(7 citation statements)

References 14 publications

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“…We further show that this method can rotate various elongated metallic entities, including nonmagnetic and magnetic nanowires as well as multiwall carbon nanotubes (MWCNT). We have also demonstrated a micromotor using a bent Au nanowire in a rotating electric field, of relevance to small fluidic or mechanical devices, such as microelectromechanical systems (MEMS) [8,9].The gold (Au), platinum (Pt), and nickel (Ni) nanowires used in this work, 300 nm in width and lengths from 2 m to 30 m, were fabricated by electrodeposition through nanoporous alumina templates as described previously [7,10]. After the alumina template was dissolved in a 4 M NaOH solution, the nanowires were sonicated, centrifuged alternately in DI water and ethanol twice, and then suspended in DI water with a low conductivity of 2:4 Siemens=cm.…”

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confidence: 99%

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confidence: 99%

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Controllable High-Speed Rotation of Nanowires

et al. 2005

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We report a versatile method for executing controllable high-speed rotation of nanowires by AC voltages applied to multiple electrodes. The rotation of the nanowires can be instantly switched on or off with precisely controlled rotation speed (to at least 1800 rpm), definite chirality, and total angle of rotation. We have determined the torque due to the fluidic drag force on nanowire of different lengths. We also demonstrate a micromotor using a rotating nanowires driving a dust particle into circular motion. This method has been used to rotate magnetic and nonmagnetic nanowires as well as carbon nanotubes.Comment: 13 pages, 5 figure

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confidence: 99%

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confidence: 99%

Controllable High-Speed Rotation of Nanowires

et al. 2005

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“…(It is shown in the Appendix that our results hold for arbitrary "sidewall" errors.) Then the natural resonant frequency becomes (5) where , the approximation is used to simplify the influence of on the length of the beams, and is held constant in the following derivations.…”

Section: Analysis Of a Folded-beam Suspended Resonator With Singlmentioning

confidence: 99%

“…R ESONATORS have been widely used as a key component in MEMS devices, such as in microgyroscopes [1]- [3], microvibromotors [4], microengines [5], and RF systems [6]. Resonators are actuated, usually electrostatically, to oscillate at their natural resonant frequency, so that the robustness of the design frequency to process variations is one of the most important functional properties for the resonator design.…”

Section: Introductionmentioning

confidence: 99%

MEMS resonators that are robust to process-induced feature width variations

Liu

Paden

Turner

2002

J. Microelectromech. Syst.

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A stability analysis and design method for MEMS resonators is presented. The frequency characteristics of a laterally vibrating resonator are analyzed. With the fabrication error on the sidewall of the structure being considered, the first and second order frequency sensitivities to the fabrication error are derived. A simple relationship between the proof mass area and perimeter, and the beam width, is developed for single material structures, which expresses that the proof mass perimeter times the beam width should equal six times the area of the proof mass. Design examples are given for the single material and multi-layer structures. The results and principles presented in the paper can be used to analyze and design other MEMS resonators.[705]

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“…Micro resonators are being developed as a key component in various resonator-based microsystems, such as resonant accelerometers [1,2], micro-electro-mechanical filters [3][4][5], microvibromotors [6], microengines [7] and gyroscopes [8,9]. The design tools, however, have not kept pace with this growth since the geometrical complexity and physical conditions of the devices are not easily incorporated into existing computational programs.…”

Section: Introductionmentioning

confidence: 99%

Nonlinear dynamic modelling for MEMS components via the Cosserat rod element approach

Cao

Wang

2005

J. Micromech. Microeng.

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The nonlinear modelling strategy and simulation of flexible components in micro-electro-mechanical structures are addressed in this paper. A newly developed Cosserat rod element approach is employed to model the dynamic equations of motion for MEMS components which are prone to nonlinear (moderately large amplitude) vibrations. Models constructed using this approach seek to capture the most significant characteristics of a microstructure in a few variables governed by a few ordinary differential equations of motion. For illustration, a resonator that comprises a resonator mass supported by four flexible beams is investigated using the proposed approach. A three-dimensional nonlinear dynamic model with six degrees of freedom is generated for the resonator. Finally, the nonlinear dynamical response of the resonator without external forces and torques has been presented through numerical simulations.

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A method for achieving constant rotation rates in a microorthogonal linkage system

Cited by 10 publications

References 14 publications

Controllable High-Speed Rotation of Nanowires

Controllable High-Speed Rotation of Nanowires

MEMS resonators that are robust to process-induced feature width variations

Nonlinear dynamic modelling for MEMS components via the Cosserat rod element approach

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