2008
DOI: 10.1002/pssc.200777735
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A method for measuring two‐dimensional refractive index distribution by using Fresnel equations and phase‐shifting interferometry

Abstract: Based on Fresnel equations and the phase‐shifting interferometry, an alternative method for measuring the two‐dimensional refractive index distribution of a material is presented. A linearly polarized light passes through a quarter wave‐plate and is incident on the tested material. The reflected light propagates through an analyzer, and then the interference signal can be obtained. The special equations to estimate the phase of the interferometric signal can be derived by using Fresnel equations. Next, the ass… Show more

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Cited by 3 publications
(1 citation statement)
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“…The first, which is widely used in phase-stepping interferometers with monochromatic or narrowband light, is to generate a dynamic phase shift by changing the path length difference between two wavefronts [13]. Ellipsometers exploiting this particular approach have been demonstrated using an electrooptic modulator as the phase shifter and a He-Ne laser as the source [14,15].…”
Section: Introductionmentioning
confidence: 99%
“…The first, which is widely used in phase-stepping interferometers with monochromatic or narrowband light, is to generate a dynamic phase shift by changing the path length difference between two wavefronts [13]. Ellipsometers exploiting this particular approach have been demonstrated using an electrooptic modulator as the phase shifter and a He-Ne laser as the source [14,15].…”
Section: Introductionmentioning
confidence: 99%