1974
DOI: 10.1016/0029-554x(74)90352-8
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A method for quantitative X-ray fluorescence analysis in the nanogram region

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Cited by 145 publications
(28 citation statements)
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“…To eliminate the resulting open degree of freedom, X-ray fluorescence (XRF) measurements have been performed. This technique and its derivates provide an element sensitive characterization method with sensitivities down to the nanogram scale and even below which in our setup is equivalent to an accuracy better than AE1% [4][5][6]. In addition to the high specific element sensitivity, these techniques provide the advantage of being non-destructive and, compared to other techniques like RBS or SIMS, no ultra high vacuum is needed.…”
mentioning
confidence: 93%
“…To eliminate the resulting open degree of freedom, X-ray fluorescence (XRF) measurements have been performed. This technique and its derivates provide an element sensitive characterization method with sensitivities down to the nanogram scale and even below which in our setup is equivalent to an accuracy better than AE1% [4][5][6]. In addition to the high specific element sensitivity, these techniques provide the advantage of being non-destructive and, compared to other techniques like RBS or SIMS, no ultra high vacuum is needed.…”
mentioning
confidence: 93%
“…However, it took almost 50 years until Yoneda and Horiuchi [3] in 1971 realized that this effect could be used to enhance the sensitivity of X-ray fluorescence (XRF) analysis by putting the sample on the surface of such a flat reflector. Subsequently, this technique was refined by Wobrauschek in his PhD thesis [4] followed by several authors [5][6][7][8] and called ''total reflection X-ray fluorescence analysis'' (TXRF).…”
Section: Introductionmentioning
confidence: 99%
“…An analysis in this angular range is called total reÑection x-ray Ñuores-cence (TXRF) analysis and is very sensitive to Ñuores-cence yields of atoms on or just below the surface. 5 If the angle of incidence is increased, the critical angle is passed and the penetration depth increases to typically some hundreds of micrometres. The critical angle is dependent on the density of the material.…”
Section: Theory Reñectivitymentioning
confidence: 99%