A method for simultaneously measuring 6DOF geometric motion errors of a precision rotary stage based on absolute position-distance measurement

Yang, Wenjun; Liu, Xiaojun; Guo, Xiaoting; Lu, Wenlong; Yao, Zhenjian; Lei, Zili

doi:10.1016/j.optlaseng.2020.106420

Cited by 12 publications

(2 citation statements)

References 21 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…CCT uses the principle of light dispersion, broad-spectrum light source through the dispersive objective lens in the axial direction to produce chromatic aberration, the back end through the spectrometer to detect the *lz516089@163.com; phone:18339698260 *lz516089@163.com; phone:18339698260 reflected focused light, through the computer inverse solution of the spectral peak can get the precise axial position, through the axial and longitudinal scanning can get the object surface profile [4,5] , thickness, displacement, and other information. Spectral confocal measurement techniques are now widely used in industrial precision manufacturing [6] , biomedical [7] , and circuit defect detection [8] due to their small size, high accuracy, and high speed.…”

Section: Introductionmentioning

confidence: 99%

Research on spectral confocal displacement measurement method based on machine learning

Zheng

Liu

et al. 2023

AOPC 2022: AI in Optics and Photonics

View full text Add to dashboard Cite

The chromatic confocal technology (CCT) uses the dispersion principle to establish an accurate encoding relationship between the spatial position and the axial focus point of each wavelength to achieve non-contact measurement. The accuracy of the measurement results is affected by the peak wavelength extraction accuracy. The flexible and adaptable characteristics of machine learning techniques are used to model the spectral wavelength and light intensity nonlinearly, establish the response relationship between input wavelength and output normalized light intensity, and refit the spectral curve distribution. In this paper, we apply the network of regression aspect of machine learning, Extreme Learning Machine(ELM), Back Propagation Neural Network(BPNN), and Genetic Algorithm optimized Back Propagation Neural Network(GA-BPNN) to fit the spectral response of the system to accurately locate the peak wavelength and compare it with the traditional peak extraction methods of Gaussian fitting, polynomial fitting, and center of the mass method to verify that the machine learning method used is significantly better than the traditional peak extraction methods in terms of peak extraction accuracy. The ELM network is the best among the three networks, with a peak extraction error of only 0.04μm and a Root Mean Square Error(RMSE) of only 6.8×10 -4. The analysis of calibration experiments, resolution, and stability experiments found that the ELM algorithm was found to have the shortest calculation time, and the system measurement resolution was explored through the ELM algorithm to be about 2μm. The research results of this paper have contributed to the improvement of the system measurement accuracy and measurement efficiency.

show abstract

Section: Introductionmentioning

confidence: 99%

Research on spectral confocal displacement measurement method based on machine learning

Zheng

Liu

et al. 2023

AOPC 2022: AI in Optics and Photonics

View full text Add to dashboard Cite

show abstract

“…At present, precision and ultra-precision processing technologies are important methods for the realization of mechanical equipment precision manufacturing [ 3 , 4 , 5 , 6 , 7 ]. Precision feed technology is a vital method for the realization of ultra-precision processing technology [ 8 , 9 , 10 ]. Thus far, the macro/micro dual-drive system has resolved the contradiction between large motion travel and high motion precision, being able to provide motion with large travel and high precision, and the macro/micro dual-drive system has been used widely in high-technology fields such as the advanced war industry, biological medicine, and precision electronics [ 11 , 12 , 13 , 14 , 15 , 16 ].…”

Section: Introductionmentioning

confidence: 99%

Positioning Performance of a Sub-Arc-Second Micro-Drive Rotary System

Zhang

Yang

et al. 2021

Micromachines

View full text Add to dashboard Cite

In the macro/micro dual-drive rotary system, the micro-drive system compensates for the position error of the macro-drive system. To realize the sub-arc-second (i.e., level of 1″–0.1″) positioning of the macro/micro dual-drive rotary system, it is necessary to study the positioning performance of the sub-arc-second micro-drive rotary system. In this paper, we designed a sub-arc-second micro-drive rotary system consisting of a PZT (piezoelectric actuator) and a micro rotary mechanism, and used simulation and experimental methods to study the positioning performance of the system. First, the micro-drive rotary system was developed to provide ultra-precise rotary motion. In this system, the PZT has ultrahigh resolution at a level of 0.1 nanometers in linear motion; a micro rotating mechanism was designed according to the composite motion principle of the flexible hinge, which could transform the linear motion of piezoelectric ceramics into rotating motion accurately. Second, the drive performance was analyzed based on the drive performance experiment. Third, kinematics, simulation, and experiments were carried out to analyze the transformation performance of the system. Finally, the positioning performance equation of the system was established based on the two performance equations, and the maximum rotary displacements and positioning error of the system were calculated. The study results showed that the system can provide precision motion at the sub-arc-second and good linearity of motion. This study has a certain reference value in ultra-precision positioning and micromachining for research on rotary motion systems at the sub-arc-second level.

show abstract

Development of positioning error measurement system based on geometric optics for long linear stage

Liu

Zeng

Chen

2021

Int J Adv Manuf Technol

View full text Add to dashboard Cite

A method for simultaneously measuring 6DOF geometric motion errors of a precision rotary stage based on absolute position-distance measurement

Cited by 12 publications

References 21 publications

Research on spectral confocal displacement measurement method based on machine learning

Research on spectral confocal displacement measurement method based on machine learning

Positioning Performance of a Sub-Arc-Second Micro-Drive Rotary System

Development of positioning error measurement system based on geometric optics for long linear stage

Contact Info

Product

Resources

About