A Method of Calculating Structural Error in Interferometer Measurement System

Abstract

We presented a new method of calculating structural error in interferometer measuring system. The position error and angle error of the light beam caused by each component can be respectively calculated and analyzed. Preliminary simulation and validation have been carried out and further study will be done in the future.

Identification and analysis of ghost reflection in the interferometers based on ZEMAX by optimization algorithms

“…The principle of the interferometer is that the Doppler effect produced by the displacement of the object to be measured is brought into the interference signal through the interfering beams, which go through a specific structure lens group. The phase shift of the interference signal can be obtained through a certain phase demodulation calculation, and the measurement results of the object displacement can be calculated based on the displacement calculation model 6 , 7 . However, the nonideal factors in this process will affect the quality and accuracy of the measured signal of the interferometer 8 , 9 .…”

“…The phase shift of the interference signal can be obtained through a certain phase demodulation calculation, and the measurement results of the object displacement can be calculated based on the displacement calculation model. 6,7 However, the nonideal factors in this process will affect the quality and accuracy of the measured signal of the interferometer. 8,9 The error phase shift leads to the superposition of Doppler frequency shift and error phase, so the calculated phase cannot accurately reflect the displacement of the object.…”