A micro-machined piezoelectric hydrophone with hydrostatically balanced air backing

Choi, Sungjoon; Lee, Haksue; Moon, Wonkyu

doi:10.1016/j.sna.2009.12.019

Cited by 48 publications

(17 citation statements)

References 18 publications

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“…1(c), bionic package structure was made. The bionic package structure is composed of two parts: transferal acoustic cap manufactured by the polyurethane [8,9] with better acoustic properties and silicone oil which is used to fill into the acoustic cap. The detailed package structure is shown in Fig.…”

Section: Simulation and Fabricationmentioning

confidence: 99%

A Bionic Fish Cilia Median-Low Frequency Three-Dimensional Piezoresistive MEMS Vector Hydrophone

Hang

et al. 2014

Nano-Micro Lett.

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A bionic fish cilia median-low frequency three-dimensional MEMS vector hydrophone is reported in this paper. The piezoresistive reasonable position was obtained through finite element analysis by ANSYS and the structure was formed by MEMS processes including lithography, ion implantation, PECVD and etching, etc. The standing wave barrel results show that the lowest sensitivity of the hydrophone is −200 dB and reach up to −160 dB (in which the voltage amplification factor is 300). It has a good frequency response characteristics in 25 Hz ∼ 1500 Hz band. Directivity tests displayed that the hydrophone has a good "8"-shaped directivity, in which the resolution is not less than 30 dB, and asymmetry of the maximum axial sensitivity value is less than 1.2 dB.

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Section: Simulation and Fabricationmentioning

confidence: 99%

A Bionic Fish Cilia Median-Low Frequency Three-Dimensional Piezoresistive MEMS Vector Hydrophone

Hang

et al. 2014

Nano-Micro Lett.

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“…For lowfrequency applications, it has rarely been reported that air backing can increase the practicability of micro-machined flexural mode receivers by enhancing their sensitivity while maintaining their integrity to hydrostatic pressure. 16,17 Recently, we reported a method to compensate the pressure imbalance between the backing air and the outside water. 17 Although the method enlarges the maximum applicable water depth limit of an air-backed hydrophone, its impractical structure requires a complex fabrication processes and it has an incomplete low-frequency response.…”

Section: Introductionmentioning

confidence: 99%

“…16,17 Recently, we reported a method to compensate the pressure imbalance between the backing air and the outside water. 17 Although the method enlarges the maximum applicable water depth limit of an air-backed hydrophone, its impractical structure requires a complex fabrication processes and it has an incomplete low-frequency response. Hence, we could not develop a practical small hydrophone with enhanced low frequency sensitivity.…”

Section: Introductionmentioning

confidence: 99%

A micro-machined piezoelectric flexural-mode hydrophone with air backing: Benefit of air backing for enhancing sensitivity

Lee

Choi

Moon

2010

The Journal of the Acoustical Society of America

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A micro-machined underwater acoustic receiver that utilizes the flexural vibration mode of a silicon thin plate and piezoelectric transduction material was investigated. In particular, air was used as the backing material for the hydrophone in order to improve sensitivity in the audible frequency range. To evaluate the effects of air backing on receiving sensitivity, a transduction model incorporating mechanical/electrical/acoustical design parameters was used in designing a piezoelectric micro-machined hydrophone. The sensitivity and displacement responses of the sensor were simulated using the model for air backing and water backing cases, and the benefit of using air backing to enhance sensitivity was confirmed. The micro-machined piezoelectric transducer was fabricated, assembled in the shape of a hydrophone, and tested to ascertain its characteristics as an underwater sensor. These characteristics, such as frequency response and sensitivity, were measured and compared with the simulated results.

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“…Basic pMUT structure was usually formed by a layer of piezo active layer sandwiched between two electrodes. However, the present of additional layer forming a diaphragm seems to be essential for stronger structure and improved bandwidth [4][5].Piezo active layer is the key in sensing mechanism where the electrostriction process occur [6]. This work utilized zinc oxide (ZnO) as piezo active material.…”

Section: Introductionmentioning

confidence: 99%

“…Manipulating structural parameters to obtain desired performance have been successfully demonstrated elsewhere for rectangular shaped pMUT. Besides resonance frequency, electromechanical coupling coefficient and acoustic impedance have been proven to be affected by structural parameter changes [4][5][6]. Furthermore, top electrode diameter of pMUT also found to give an effect on maximum diaphragm deflection [10].…”

Section: Introductionmentioning

confidence: 99%

Modeling and theoretical characterization of circular pMUT for immersion applications

Yaacob

Arshad

Manaf

2010

Oceans'10 Ieee Sydney

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Abstract-This paper reported modeling and theoretical characterization of circular piezoelectric micromachined ultrasonic transducer (pMUT) for immersion applications. Zinc oxide (ZnO) was employed as piezo active material and nickel aluminum bronze alloy UNS C63000 (CuAl 10 Ni 5 Fe 4 ) also known as 'sea bronze', was introduced as electrodes. First, virtual fabrication process was carried out within software environment to form a pMUT model. Then, resonance frequency of the model was finalized and fine tuned by manipulating its structural parameters which are diaphragm diameter and piezo active layer thickness. Next, receiving and transmitting responses were estimated using finite element approach through the combination of piezoelectric analysis and modal analysis. From these analyses, the pMUT model having a resonance frequency of 40.82 kHz was successfully modeled. Transmitting response was estimated at 137 dB (re 1 µPa/V) at 41 kHz on the surface of the transducer while the receiving response was estimated at -93 dB (re 1 V/µPa) at 38 kHz of frequency. Virtual fabrication process and finite element analysis for model performances estimation have proved to reduce the development time. From the comparison made, the usage of sea bronze and ZnO film replacing conventional gold, platinum and lead zirconate titanate (PZT) were proven to deliver exceptional performances with better durability. However, device fabrication is essential in order to validate the findings and this will be included in our future works. Furthermore, the model needs to be extended so that the value of acoustic impedance within the device can be estimated.

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A micro-machined piezoelectric hydrophone with hydrostatically balanced air backing

Cited by 48 publications

References 18 publications

A Bionic Fish Cilia Median-Low Frequency Three-Dimensional Piezoresistive MEMS Vector Hydrophone

A Bionic Fish Cilia Median-Low Frequency Three-Dimensional Piezoresistive MEMS Vector Hydrophone

A micro-machined piezoelectric flexural-mode hydrophone with air backing: Benefit of air backing for enhancing sensitivity

Modeling and theoretical characterization of circular pMUT for immersion applications

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