A Micro-Opto-Electro-Mechanical System (MOEMS) for Microstructure Manipulation

Waveguide microgripper for identification, sensing and manipulation

“…The spectrum obtained for the laser and UV differs in 2 key aspects. First, the UV illumination leads to a peak at 560nm, which has been attributed to the fluorescence of the SU8 material [18]. Secondly, the laser illumination presents a dip in the quantum dot peak.…”

“…The output of microgripper when connected to the spectrometer will help identify the wavelength at which the object fluoresces. Quantum dot tagging has been successfully demonstrated previously by the Martinez et al [18] where a known concentration of 3 different wavelength quantum dots were poured onto SU8 slabs and allowed to dry. The slabs were then inserted into the microgripper arms gap and were illuminated by 532nm green laser light to excite the quantum dots.…”

“…The other notable thing in the fluorescence spectrum is a peak around 550nm for UV and a dip in the peak close to 600nm for the laser. The 550 nm peak for the UV spectrum is attributed to the SU8 fluorescence [18]. Figure 33 shows the photoluminescence and absorption spectra of CdSe quantum dots.…”

“…Martinez [18]. The basic mask layout comprised of frames supporting microgrippers with arm widths 10, 20, 30, 40, 50 and 100 microns.…”

“…Due to limited feedback implementation so far, it is important to integrate a feedback mechanism which would allow the analysis of physical, mechanical, optical and chemical information of the micro object under study. A microgripper with integrated optical feedback has been developed entirely at Florida International University nanofabrication facility by Jose A. Martinez [18]. The device consists of flexible optical waveguides which can act as the gripping arms for grasping a microobject as well as enable the delivery and collection of light.…”