A micro plasma reactor for fluorinated waste gas treatment

Sichler, Philipp; Büttgenbach, S.; Baars-Hibbe, Lutz; Schrader, Christian; Gericke, Karl‐Heinz

doi:10.1016/j.cej.2004.01.008

Cited by 30 publications

(20 citation statements)

References 6 publications

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“…Novel applications have been developed by the combination of microreactor technology and non-equilibrium plasma chemistry. Microplasmas in confined microchannels were used for the purpose of nanostructure synthesis [17][18][19][20], decomposition of volatile organic compounds [21][22][23][24] and chemical synthesis [25][26][27][28][29][30][31][32]. Recently, Nozaki et al reported a direct and selective synthesis of oxygenates via methane partial oxidation at room temperature using a non-thermal discharge microreactor [33][34][35].…”

Section: Introductionmentioning

confidence: 99%

Gas-to-liquids process using multi-phase flow, non-thermal plasma microreactor

Agiral

Nozaki

Nakase

et al. 2011

Chemical Engineering Journal

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Section: Introductionmentioning

confidence: 99%

Gas-to-liquids process using multi-phase flow, non-thermal plasma microreactor

Agiral

Nozaki

Nakase

et al. 2011

Chemical Engineering Journal

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“…A variety of applications have been demonstrated in recent works [18][19][20][21][29][30][31][32], covering the decomposition of waste gases, the sterilization and the area-selective modification of various surfaces as a pre-treatment for the electroless deposition of nickel or the peptide synthesis. This shows that microplasma sources are a suitable plasma source for the plasma treatment at atmospheric pressure and with it gives rise to be powerful process tools for future applications.…”

Section: Discussionmentioning

confidence: 99%

“…MSE arrays were first used as the base of a microreactor for the decomposition of fluorinated waste gases, which achieves decomposition rates of up to 90 % [18,19]. Second, the MSE arrays were applied to the deposition of thin films (SiO 2 , DLC) [20,21].…”

Section: Microstructured Electrodesmentioning

confidence: 99%

Microstructured Plasma Sources

Büttgenbach

Lucas

Sichler

2009

Contrib. Plasma Phys.

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Dielectric barrier discharges generated in microcavities or by the use of microstructures have gained increasing interest in research and industry in recent years. This is due to the advantages of small dimensions of microstructured plasma sources and particularly their ability to generate plasmas at atmospheric pressure. In the scope of this work the design and fabrication of two different microplasma sources is presented. First, microplasma reactors based on microstructured electrode arrays which have detailed dimensions in the range of some tens of micrometers and have been successfully applied for the decomposition of waste gases are presented. Subsequently microplasma stamps, which allow the generation of microplasmas in closed cavities and which are powerful process tools for area‐selective modification of various surfaces at atmospheric pressure, are presented. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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“…The short transit time in the plasma zone was also used for the generation of ultra small Si nanoparticles with controlled diameters of only a few nm [77]. By using many parallel microdischarges important applications are foreseen in pollution control, e. g. the abatement of CF 4 , NO x and hydrocarbons [16], [79]. Since plasmas can inactivate microorganisms like cells, bacteria, spores, viruses, microplasma or MSE arrays have also been investigated with respect to the decontamination and sterilization of surfaces [56], [80].…”

Section: Applications Of Microplasmasmentioning

confidence: 99%

Applications of Microplasmas and Microreactor Technology

Kogelschatz

2007

Contrib. Plasma Phys.

101

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During the last decade a number of microcavity plasma devices have been developed. Examples are microhollow cathode (MHC) discharges and cathode boundary layer (CBL) discharges proposed by Schoenbach, capillary plasma electrode (CPE) discharges proposed by Kunhardt and Becker, and micro-structured electrode arrays (MSEs) introduced by Gericke and Penache. Arrays of microplasmas based on silicon, ceramic, or metal/polymer structures were investigated by Eden, Frame, Park and coworkers. A breakthrough in the life expectancy of such devices was achieved when all metal electrodes were covered by dielectrics, thus combining dielectric-barrier discharge technology with microcavity plasma devices.The advantage of this technology is that large numbers of miniature atmospheric-pressure non-equilibrium discharges can be operated in parallel. Applications include emitters for visible and UV radiation, photodetectors, sensors, decontamination, surface modification, etching, film deposition, generation of nanoparticles. Operated in different gas mixtures many of these devices proved to be efficient emitters of ultraviolet excimer radiation. If a small gas flow is fed through these microplasmas applications for plasmachemical synthesis and pollution control become feasible. Novel applications are expected from the combination of microreactor technology with non-equilibrium plasma chemistry. Doping or coating of the dielectric surfaces results in additional catalytic effects.

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A micro plasma reactor for fluorinated waste gas treatment

Cited by 30 publications

References 6 publications

Gas-to-liquids process using multi-phase flow, non-thermal plasma microreactor

Gas-to-liquids process using multi-phase flow, non-thermal plasma microreactor

Microstructured Plasma Sources

Applications of Microplasmas and Microreactor Technology

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