A Micro Pump Driven by a Thin Film Permanent Magnet

Zhi, Chao; Shinshi, Tadahiko; Uehara, Minoru

doi:10.1299/jamdsm.6.1180

Cited by 7 publications

(2 citation statements)

References 17 publications

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“…Thus, small-size, lightweight, low-power-consumption micropumps are conceptually required for fluid manipulation in these portable systems and have attracted great interest [ 25 – 27 ]. To date, numerous micropumps based on different principles have been developed, such as thermopneumatic [ 28 ], piezoelectric [ 29 – 41 ], electromagnetic [ 42 – 45 ], phase-change [ 46 ], dielectric elastomer [ 47 ], electroosmotic [ 48 ], electrohydrodynamic [ 49 ], and acoustic [ 23 , 50 – 55 ] systems. A micropump for a practical portable system should provide sufficient pumping performance without damaging the portability, which, in simple terms, requires the micropump to be small and easy to drive.…”

Section: Introductionmentioning

confidence: 99%

A Miniaturized Wireless Micropump Enabled by Confined Acoustic Streaming

You,

Fan,

Wang

et al. 2024

Research

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Miniaturization of health care, biomedical, and chemical systems is highly desirable for developing point-of-care testing (POCT) technologies. In system miniaturization, micropumps represent one of the major bottlenecks due to their undesirable pumping performance at such small sizes. Here, we developed a microelectromechanical system fabricated acoustic micropump based on an ultrahigh-frequency bulk acoustic wave resonator. The concept of an inner-boundary-confined acoustic jet was introduced to facilitate unidirectional flow. Benefitting from the high resonant frequency and confined acoustic streaming, the micropump reaches 32.620 kPa/cm 3 (pressure/size) and 11.800 ml/min∙cm 3 (flow rate/size), showing a 2-order-of-magnitude improvement in the energy transduction efficiency compared with the existing acoustic micropumps. As a proof of concept, the micropump was constructed as a wearable and wirelessly powered integrated drug delivery system with a size of only 9×9×9 mm 3 and a weight of 1.16 g. It was demonstrated for ocular disease treatment through animal experimentation and a human pilot test. With superior pumping performance, miniaturized pump size, ultralow power consumption, and complementary metal–oxide–semiconductor compatibility, we expect it to be readily applied to various POCT applications including clinical diagnosis, prognosis, and drug delivery systems.

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Section: Introductionmentioning

confidence: 99%

A Miniaturized Wireless Micropump Enabled by Confined Acoustic Streaming

You,

Fan,

Wang

et al. 2024

Research

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“…Among these micro-nano devices, microvalve structures can control liquid flow driven by a current signal, so it becomes an important control unit in the microfluidic devices [ 5 , 6 , 7 ]. The existing traditional microvalves are generally assembled by a cavity and a valve plate [ 8 , 9 , 10 ]. The fabrication of the cavity and valve plate requires high precision.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Three-Dimensional Microvalves of Internal Nested Structures Inside Fused Silica

et al. 2021

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Nested structures inside the hard material play a pivotal role in the microfluidics systems, such as the microvalve and the micropump. In this article, we demonstrate a novel and facile method of fabricating nested structures inside the fused silica with a two-step process femtosecond laser wet etching (FLWE) process. Inside fused silica, a spherical structure was made with a diameter of nearly 80 µm in a square chamber. In addition, we designed a simple microvalve with this sphere controlling the current’s flow. The novel microvalve structure can be easily integrated into the functional microfluidics systems and will be widely applied in the Lab-on-chip (LOC) system.

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