A micro translating lens unit for stereo imaging through single-image endoscope

Monolithically integrated glass microlens scanner using a thermal reflow process

“…The overall size of the device is designed to fit within a circle with a diameter of 3 mm for potential use in various miniaturized imaging applications, such as endoscopy. The resonant frequency and the lateral displacement vary from 204 to 4.5 kHz and ± 40 to ± 70 μm, respectively, in conventional microlens scanning devices [4,7,8,10]. The designed lateral displacement and resonant frequency of the proposed scanner are ± 50 μm and 2.1 kHz, respectively.…”

“…As with micromirrors [1][2][3], devices with integrated microlenses are commonly used in optical systems either to change the focal length or to steer incident light beam in both static and dynamic modes. Examples include optical scanners for lateral [4][5][6][7][8] or depth scans [9][10][11], wavefront analyzers [12] and optical cross connects [13]. Regarding aforementioned devices, fabrication and assembly methods for microlens significantly affect the achievable functionalities and degree of integration of the system.…”

“…Several studies have introduced various methods for fabricating microlenses and relevant approaches for integration with supporting structures. One typical method utilizes a commercially available microlens [7,8,10,11]. Laterally or vertically movable stages based on conventional SOI (silicon-on-insulator) process and electrostatic actuation, and stages utilizing bimorph electrothermal actuators are fabricated.…”

2-D forward optical scanner with glass microlens and isolation blocks using thermal reflow

“…wave front analysis, optical communication, and endoscopic imaging. However, complicated manual assembly process of the microlens and the target device was unavoidable, as the microlens was typically fabricated with thermally unstable polymers [1] or glass using conventional machining process [2].…”