A microbeam analytical characterization of diamond films

Cook, A.; Fitzgerald, A. G.; Storey, B E; Wilson, J. I. B.; Jubber, M. G.; Milne, David; Drummond, Ian; Savage, J. A.; Haq, Sajad

doi:10.1016/0925-9635(92)90148-h

Cited by 9 publications

(8 citation statements)

References 13 publications

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“…It can be done either from the intensity of the π related feature at 5 – 6 eV or from the value of the σ + π plasmon energy at 23 – 30 eV . EELS gives the straightforward results for pure diamond, graphite and amorphous carbon, but in the samples with intermediate or low ratios of sp 2 /sp 3 , its sensitivity is too low For example, it was demonstrated in ref . that the π plasmon can be completely absent in the samples with sp 2 content of 60%.…”

Section: Introductionmentioning

confidence: 99%

“…Careful analysis of C 1 s spectrum in graphite indicates that it is a single peak, well described by an asymmetric Doniach-Šunjic function. [10,25] The situation of diamond is quite different: the literature data for BE of C 1 s peak are varying from about 284 eV [14,[27][28][29] to about 286 eV, [11,27,30] what can be explained by the possible influence of sample charging due to the electrical insulation of this allotrope, especially if it is undoped. However, much more important are not the absolute BE values, but the chemical shift between graphite and diamond.…”

Section: Introductionmentioning

confidence: 99%

“…However, much more important are not the absolute BE values, but the chemical shift between graphite and diamond. The results of photoemission experiments and theoretical calculations of this shift give the values from 0-0.2 eV [13,14,21,23,29,31,32] to relatively high values, varying between 0.7 and 1.5 eV. [11,12,20,22,30,[33][34][35][36] Again, the high scattering of these values can be explained by the effect of possible sample charging and/or by the presence of the BE shift between the surface and bulk of the diamond.…”

Section: Introductionmentioning

confidence: 99%

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Spectroscopy of carbon: from diamond to nitride films

Kačiulis

2012

Surface & Interface Analysis

178

166

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Every surface scientist knows about the importance of carbon spectroscopy: the signals of C 1 s and C KLL usually are indicating the surface cleanness, whereas C 1 s peak is often used as a reference for the calibration of energy scale. Carbon spectroscopy becomes even more important in the case of the studies dedicated to new carbon-based materials, such as nanotubes, graphene, diamond-like carbon (DLC), carbon nitride, carbides, etc. It is well-known that the carbon atoms can be arranged in a great variety of crystalline and disordered structures, because their electrons can hybridize in sp 3 , sp 2 and even in linear sp configurations. Namely, the hybridization of carbon electrons defines the mechanical, electrical and optical properties of these materials. Indeed, between the pure diamond (sp 3 ) and graphite (sp 2 ), there are many phases of amorphous material characterized by different sp 2 /sp 3 ratios and generally named DLC. Electron spectroscopies (X-ray photoelectron spectroscopy, Auger electron spectroscopy and electron energy loss spectroscopy) are widely recognized as analytical techniques, able to identify the bonds of diamond, graphite and amorphous phases of carbon. The binding energy of C 1 s spectrum together with its plasmon losses, the shape of Auger peak and valence band spectra can be used to characterize the structure of carbon-based materials. In this study, an overview is reported on carbon spectroscopy, comparing different experimental methods. Their application for the characterization of DLC and carbon nitride films, including the determination of carbon's sp 2 /sp 3 ratio is discussed and illustrated by experimental results obtained for a series of thin films of these materials.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Spectroscopy of carbon: from diamond to nitride films

Kačiulis

2012

Surface & Interface Analysis

178

166

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“…These measured values are close to the accepted binding energy values of 284.4 eV for amorphous carbon and 284.3 for graphite material. 4 After ion etching, the peak position for both the amorphous carbon film and graphite crystal is slightly shifted to a higher binding energy and the peak width becomes broader, particularly for the graphite crystal.…”

Section: Resultsmentioning

confidence: 98%

X‐ray photoelectron spectroscopy studies of CVD diamond films

Fan

Fitzgerald

John

et al. 2002

Surface & Interface Analysis

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In this research work, a comparative x-ray photoelectron spectroscopy (XPS) analysis has been performed on three allotropic carbon materials i.e. amorphous carbon films, graphite crystals and chemically vapour deposited (CVD) diamond films. These studies have shown that XPS is one of the most powerful techniques used to distinguish the diamond phase of carbon from the graphite and amorphous carbon components. In these investigations, particular attention has been paid to the effects of the post-deposition surface treatment on the diamond surfaces and the corresponding spectrum changes. The experimental results confirmed that ion surface cleaning destroys the original carbon atomic bonding configuration and implants argon atoms into the sample surface. The main spectral changes for amorphous carbon, graphite and diamond materials after the ion etching process can be attributed to bonding modification and the existence of argon contamination on the sample surfaces.

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“…The main characteristics of XPS valence band spectra taken from an amorphous carbon film, a graphite crystal and the CVD diamond films agree well with theoretical expectation and previous experimental results. [11][12][13] Careful examination of these spectra also reveals some differences between the as-deposited and hydrogen plasma etched films. The peak resulting from s-p hybridization in the range of 10-15 eV has a higher intensity in the spectrum taken from a hydrogen plasma etched diamond film.…”

Section: Surface Atomic Bonding Configurationsmentioning

confidence: 99%

Characterization of the surface morphology and electronic properties of microwave enhanced chemical vapor deposited diamond films

Fitzgerald

Fan

Troupe

et al. 2000

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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The surface morphology, electronic structure and atomic bonding configurations of chemical vapor deposition ͑CVD͒ diamond films prepared at different stages of the deposition process and subjected to different postdeposition surface treatments have been studied by scanning probe microscopy ͑SPM͒, scanning tunneling spectroscopy ͑STS͒, and x-ray photoelectron spectroscopy ͑XPS͒ surface analysis techniques. SPM image observations show that ͑a͒ in the biasing nucleation process, diamond crystallites grow in a three-dimensional manner and the nucleation density reaches 10 9 -10 10 /cm 2 ; ͑b͒ both as-deposited and boron ion implanted films exhibit a hillock morphology on ͑100͒ crystal faces; ͑c͒ atomic flatness can be achieved on crystal faces by hydrogen plasma etching. STS analysis indicates that ͑i͒ the films obtained after an initial biasing nucleation process show a metallic tunneling behavior; ͑ii͒ both as-deposited and hydrogen plasma etched CVD diamond films possess typical p-type semiconductor surface electronic properties; ͑iii͒ when the as-deposited diamond films are subjected to boron implantation or argon ion etching, the surface electronic properties change from p-type semiconducting behavior to metallic behavior. XPS analysis confirmed that the surfaces for both as-deposited and hydrogen plasma etched diamond films have a tetrahedral atomic bonding configuration. However, the surfaces of boron ion implanted and argon ion etched diamond films exhibited an amorphous carbon-like feature which can be attributed to the surface damage caused by ion bombardment.

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A microbeam analytical characterization of diamond films

Cited by 9 publications

References 13 publications

Spectroscopy of carbon: from diamond to nitride films

Spectroscopy of carbon: from diamond to nitride films

X‐ray photoelectron spectroscopy studies of CVD diamond films

Characterization of the surface morphology and electronic properties of microwave enhanced chemical vapor deposited diamond films

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