A Microfabricated Wireless RF Pressure Sensor Made Completely of Biodegradable Materials

Luo, Ming; Martinez, Adam W.; Song, Chao; Herrault, Florian; Allen, Mark G.

doi:10.1109/jmems.2013.2290111

Cited by 143 publications

(123 citation statements)

References 33 publications

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“…Additionally, investigators have explored designing transducers with different materials and structures. Polymers, in particular, have garnered interest due to advantages in microfabrication, avoidance of the bulky support chip, and higher pressure sensitivity [32][33][34][35][36][37][38]. While there are tradeoffs with polymer designs, these factors have contributed to reduced overall scale and improved flexibility for implantable applications.…”

Section: Early History and Overviewmentioning

confidence: 99%

“…Numerous explorations of polymer based pressure sensors can be found within the recent literature of pressure sensors, covering polyimide, parylene, and polydimethylsiloxane constructions [96][97][98][99][100][101]. Additional examples can be found in the biomedical literature, particularly in the cardiovascular and ophthalmic fields [34][35][36][37][38].…”

Section: Recent Developmentsmentioning

confidence: 99%

See 1 more Smart Citation

Evolution of micromachined pressure transducers for cardiovascular applications

Starr

Bartels

Agrawal

et al. 2015

Sensors and Actuators A: Physical

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Section: Early History and Overviewmentioning

confidence: 99%

Section: Recent Developmentsmentioning

confidence: 99%

Evolution of micromachined pressure transducers for cardiovascular applications

Starr

Bartels

Agrawal

et al. 2015

Sensors and Actuators A: Physical

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“…Luo et al fabricated fully bioresorbable capacitors using a PLLA substrate sealed with PCL, with metal connections and electrodes made of iron (adhesion promoter) and zinc. Namely, iron (5–10 µm thick) and zinc (50 µm) were electroplated through a mask in order to fabricate a coil (inductor) connected to two disks (capacitor electrodes); the obtained metal traces were then laminated on a poly( l ‐lactide) (PLLA) substrate (200–300 µm), and the assembly was folded so as to obtain a plane capacitor with the metal disks separated by a 30 µm PLLA O‐ring, and sealed with 40 µm PCL spacer.…”

Section: Bioresorbable Electrical Devicesmentioning

confidence: 99%

Bioresorbable Materials on the Rise: From Electronic Components and Physical Sensors to In Vivo Monitoring Systems

2020

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Over the last decade, scientists have dreamed about the development of a bioresorbable technology that exploits a new class of electrical, optical, and sensing components able to operate in physiological conditions for a prescribed time and then disappear, being made of materials that fully dissolve in vivo with biologically benign byproducts upon external stimulation. The final goal is to engineer these components into transient implantable systems that directly interact with organs, tissues, and biofluids in real‐time, retrieve clinical parameters, and provide therapeutic actions tailored to the disease and patient clinical evolution, and then biodegrade without the need for device‐retrieving surgery that may cause tissue lesion or infection. Here, the major results achieved in bioresorbable technology are critically reviewed, with a bottom‐up approach that starts from a rational analysis of dissolution chemistry and kinetics, and biocompatibility of bioresorbable materials, then moves to in vivo performance and stability of electrical and optical bioresorbable components, and eventually focuses on the integration of such components into bioresorbable systems for clinically relevant applications. Finally, the technology readiness levels (TRLs) achieved for the different bioresorbable devices and systems are assessed, hence the open challenges are analyzed and future directions for advancing the technology are envisaged.

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“…Moreover, PVA is a FDA-approved, biocompatible polymer that is found in various consumer food products [28]. Kapton film was selected as the substrate to facilitate post-plating substrate removal and packaging with biodegradable material sets [29].…”

Section: B Fabrication Process Compatible With Biodegradable Memsmentioning

confidence: 99%

Development of Electroplated Magnesium Microstructures for Biodegradable Devices and Energy Sources

Tsang

Armutlulu

Herrault

et al. 2014

J. Microelectromech. Syst.

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This paper presents fabrication approaches for magnesium (Mg) microstructures embedded in biodegradable polymers using through-mold Mg electrodeposition and metaltransfer-molding. Biodegradable implantable electronics have garnered increasing interest from the medical community for the monitoring and treatment of transient diseases. Magnesium is a biodegradable metal with desirable properties, and the ability to micropattern Mg thick films (i.e., about >1 µm) with direct microelectromechanical systems (MEMS) integration would support the development of more sophisticated and clinically relevant biodegradable devices and microsystems. Magnesium microstructures were electroplated through micropatterned water-soluble molds in a nonaqueous electrolyte and transfer molded into a biodegradable polymer. Electroplated Mg compared favorably with commercial Mg foil based on elemental composition, crystal orientation, electrical resistivity, and corrosion behavior. Magnesium electroplated to a thickness of up to 50 µm showed a grain size of ∼10 µm, and minimum feature dimensions of 100 µm in width and spacing. Completely biodegradable Mg and poly-L-lactic acid constructs were demonstrated. The application of Mg thick films toward biodegradable energy sources was explored through the fabrication and testing of biodegradable Mg/Fe batteries. The batteries exhibited a capacity and power of up to 2.85 mAh and 39 µW, respectively. Results confirmed the advantages of electrodeposited Mg microstructures for biodegradable MEMS applications. [2014-0103]

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A Microfabricated Wireless RF Pressure Sensor Made Completely of Biodegradable Materials

Cited by 143 publications

References 33 publications

Evolution of micromachined pressure transducers for cardiovascular applications

Evolution of micromachined pressure transducers for cardiovascular applications

Bioresorbable Materials on the Rise: From Electronic Components and Physical Sensors to In Vivo Monitoring Systems

Development of Electroplated Magnesium Microstructures for Biodegradable Devices and Energy Sources

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